JPH01170426U - - Google Patents
Info
- Publication number
- JPH01170426U JPH01170426U JP6549288U JP6549288U JPH01170426U JP H01170426 U JPH01170426 U JP H01170426U JP 6549288 U JP6549288 U JP 6549288U JP 6549288 U JP6549288 U JP 6549288U JP H01170426 U JPH01170426 U JP H01170426U
- Authority
- JP
- Japan
- Prior art keywords
- suction port
- perforated plate
- attached
- lattice device
- adsorbent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6549288U JPH01170426U (ko) | 1988-05-18 | 1988-05-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6549288U JPH01170426U (ko) | 1988-05-18 | 1988-05-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01170426U true JPH01170426U (ko) | 1989-12-01 |
Family
ID=31290927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6549288U Pending JPH01170426U (ko) | 1988-05-18 | 1988-05-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01170426U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04126513A (ja) * | 1990-08-31 | 1992-04-27 | Hitachi Plant Eng & Constr Co Ltd | クリーンルーム |
-
1988
- 1988-05-18 JP JP6549288U patent/JPH01170426U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04126513A (ja) * | 1990-08-31 | 1992-04-27 | Hitachi Plant Eng & Constr Co Ltd | クリーンルーム |