JPH0117005Y2 - - Google Patents

Description

[Detailed description of the invention] (Industrial application field) A condensing heating device is a device in which an object to be heated is placed near the focal point of a reflecting mirror made of an ellipsoid of revolution, and performs heating, rapid cooling, crystal growth, etc. . This device uses a single ellipsoidal reflector consisting of only one spheroidal surface.
There is a bielliptic type in which the reflecting mirror is made up of a combination of two spheroidal surfaces, and a polyelliptic type in which the reflecting mirror is made up of a combination of three or more spheroidal surfaces. In a condensing heating device, the required heating temperature distribution of the heated object varies, and uniform heating over a wide range is often required as well as local heating. In order to meet these different requirements for heating ranges, this invention
This invention relates to a multi-elliptical condensing heating device that can change the state of heating temperature distribution of an object to be heated.

(Prior art and its problems) Next, the drawbacks of the conventional condensing heating device will be explained with reference to the drawings.

Fig. 1 is a vertical cross-sectional view showing the basic configuration of the heating furnace part of a multi-elliptical condensing heating device in which the reflecting mirror is composed of four spheroidal surfaces, and Fig. 2 is a cross-sectional view. .

In the figure, 11 is a spheroidal mirror, 12 is a light source such as a halogen lamp, 13 is an object to be heated, 14 is a sliding guide, 15 is a frame, and 16 is a lock mechanism. The light source 12 is installed near one focus F ₁ , F ₂ , F ₃ , F ₄ of the spheroid of the spheroid mirror 11,
The light emitted from this is reflected by the spheroidal mirror and focused on the other side near the focal points F' ₁ , F' ₂ , F' ₃ , and F' ₄ . By placing the object to be heated 13 near this focal point, the object to be heated can be heated. Further, the sliding guide 14 is connected to the spheroidal mirror 11.
At the same time, by releasing the lock mechanism 16, it can be moved along the frame 15 in the x-axis direction, and it can be fixed at any position by the lock mechanism. Therefore, the heating side focal points of the four spheroidal mirrors can be set at different positions on the x-axis, and as a result, the focused heating energy can be applied to the
Can be distributed in the axial direction.

Figures 3a and 3b show the heated object 13 in Figure 1.
FIG. 2 is a diagram showing the distribution of energy irradiated to the surface of the object, where a shows an example of the distribution in the x-axis direction, and b shows an example of the distribution in the circumferential direction of the surface of the heated object centered on the F ₁ ' point. It is a diagram. The irradiation energy intensity in Fig. 3a shows the integral value in the circumferential direction, and the irradiation energy intensity in Fig. 3b shows that the plane perpendicular to the x-axis including point _F'1 and the surface of the object to be heated are It shows the value near the circumference formed by the intersection. Looking at Figure 3a, the irradiation energy is distributed on the x-axis, and the heated object is
It can be seen that a wide range in the x-axis direction is heated with small temperature fluctuations.

However, as shown in FIG. 3b, the irradiation energy is not uniformly applied in the circumferential direction, and the object to be heated undergoes large temperature fluctuations in the circumferential direction. When it is necessary to heat a wide range of the object to be heated in the x-axis direction with small temperature fluctuations, it is generally necessary to reduce temperature fluctuations in the circumferential direction as well. Therefore, although the conventional apparatus was capable of heating over a wide range in the x-axis direction, it had the disadvantage of large temperature fluctuations in the circumferential direction.

(Purpose of the Invention) The object of the present invention is to provide an apparatus that eliminates such conventional drawbacks and heats a sample over a wide range in both the axial direction and the circumferential direction with small temperature fluctuations.

(Structure of the invention) According to the invention, by having a structure in which the opposing spheroidal mirrors move simultaneously in the axial direction of the object to be heated, temperature fluctuations are small over a wide range in the axial direction of the object to be heated, and A condensing heating device with less temperature fluctuation in the circumferential direction can be obtained.

(Summary of the present invention) By adopting the above-described configuration, the present invention enables the heating-side focal points of the spheroidal mirrors located at mutually opposing positions to coincide, while the spheroidal mirrors located at other positions not facing each other By setting it at a position on the x-axis different from the heating side focal point, the focused heating energy can be dispersed in the axial direction of the object to be heated and can be irradiated smoothly in the circumferential direction of the object to be heated.

(Example) Examples of the present invention will be described in detail below with reference to the drawings.

FIG. 4 is a longitudinal cross-sectional view of a heating furnace portion of a condensing heating device constructed by a combination of four spheroidal mirrors, which is an embodiment of the present invention, and FIG. 5 is a cross-sectional view. .

In the figure, 21 and 21' are spheroidal mirrors,
22 is a light source such as a halogen lamp, 23 is an object to be heated, 24 is a sliding guide, 25 is a frame, and 26 is a lock mechanism. The light source 22 is a spheroidal mirror 2
One focus of the spheroid of 1 and 21' F ₅ , F ₆ ,
They are installed near F ₇ and F ₈ , and the light emitted from them is reflected by the spheroidal mirror and focused at the other focal points F' ₅ , F' ₆ and near F' ₇ and F' ₈ .

The sliding guide 24, together with the spheroidal mirror 21, can be moved in the x-axis direction along the frame 25 by releasing the locking mechanism 26, and can be fixed at any position by the locking mechanism. Moreover, the spheroidal mirror 21' is
It is fixed to the frame 25.

(Effect of the invention) Figures 6a and 6b are diagrams showing the energy distribution irradiated to the heated object 23 in Figure 4. Figure 6a is an example of the distribution in the x-axis direction, and Figure _6b is an example of the distribution in the x-axis direction. , F is a diagram illustrating an example of the distribution in the circumferential direction of the surface of the heated object centered on _{the 6} points.

The irradiation energy intensity in Fig. 6a shows the integral value in the circumferential direction, and the irradiation energy intensity in Fig. 6b shows the plane perpendicular to the x ₁ axis including points F' ₅ and F' ₆ and the It shows the value near the circumference formed by the intersection with the surface of the heated object. Looking at FIG. 6a, it can be seen that the temperature is distributed on the x-axis, and the object to be heated is heated over a wide range in the x-axis direction with small temperature fluctuations. Also,
Looking at FIG. 6b, it can be seen that the irradiation energy is applied uniformly in the circumferential direction, and the object to be heated is heated with small temperature fluctuations even in the circumferential direction. In this way, since the object to be heated can be heated uniformly in the axial direction and circumferential direction, it has the advantage that crystal defects can be reduced compared to conventional methods.

As a typical embodiment of the present invention, a condensing heating device combining four spheroidal mirrors has been described above, but this is for convenience of explanation, and the present invention is applicable to other multi-ellipsoidal condensing devices. It is clear that it can also be applied to heating devices.

[Brief explanation of the drawing]

FIGS. 1 and 2 are diagrams showing conventional examples of condensing heating devices. Figures 3a and 3b are diagrams showing the distribution of energy irradiated onto the surface of the heated object in the condensing heating device of Figure 1. Figure 3a shows the axial distribution of the heated object; Figure b shows the circumferential distribution of the heated object. FIG. 4 and FIG. 5 are diagrams showing an embodiment of the present invention. Figures 6a and 6b are diagrams showing the distribution of energy irradiated onto the surface of the heated object in the condensing heating device of Figure 4, where Figure 6a shows the axial distribution of the heated object; b shows the circumferential distribution of the heated object. In the figure, 11, 21, 21' are spheroidal mirrors, 12, 22 are light sources such as halogen lamps, 1
3 and 23 are objects to be heated, 14 and 24 are sliding guides, 15 and 25 are frames, and 16 and 26 are lock mechanisms.

Claims (1)

[Scope of utility model registration request] In a condensing heating device in which a light source is provided at one focal point of a plurality of spheroidal mirrors and the light is concentrated at the other focal point to heat an object to be heated, a rotating ellipsoidal mirror having a common focal point facing each other is used. A condensing heating device characterized by having a mechanism in which ellipsoidal mirrors move independently in the axial direction of an object to be heated.