JPH01169026U - - Google Patents
Info
- Publication number
- JPH01169026U JPH01169026U JP6482488U JP6482488U JPH01169026U JP H01169026 U JPH01169026 U JP H01169026U JP 6482488 U JP6482488 U JP 6482488U JP 6482488 U JP6482488 U JP 6482488U JP H01169026 U JPH01169026 U JP H01169026U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- cleaning
- semiconductor
- semiconductor wafer
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000005498 polishing Methods 0.000 claims description 9
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6482488U JPH01169026U (fi) | 1988-05-17 | 1988-05-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6482488U JPH01169026U (fi) | 1988-05-17 | 1988-05-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01169026U true JPH01169026U (fi) | 1989-11-29 |
Family
ID=31290280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6482488U Pending JPH01169026U (fi) | 1988-05-17 | 1988-05-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01169026U (fi) |
-
1988
- 1988-05-17 JP JP6482488U patent/JPH01169026U/ja active Pending