JPH01169025U - - Google Patents

Info

Publication number

JPH01169025U

JPH01169025U JP6634688U JP6634688U JPH01169025U JP H01169025 U JPH01169025 U JP H01169025U JP 6634688 U JP6634688 U JP 6634688U JP 6634688 U JP6634688 U JP 6634688U JP H01169025 U JPH01169025 U JP H01169025U

Authority

JP

Japan

Prior art keywords

metering pump

coating apparatus

container

resist

resist coating

Prior art date

1988-05-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 4
• 238000000576 coating method Methods 0.000 claims description 4
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1
• 229920002120 photoresistant polymer Polymers 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1

Cited By (1)