JPH01169024U - - Google Patents

Info

Publication number
JPH01169024U
JPH01169024U JP6452488U JP6452488U JPH01169024U JP H01169024 U JPH01169024 U JP H01169024U JP 6452488 U JP6452488 U JP 6452488U JP 6452488 U JP6452488 U JP 6452488U JP H01169024 U JPH01169024 U JP H01169024U
Authority
JP
Japan
Prior art keywords
exhaust hole
wafers
quartz tube
diffusion furnace
vertical diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6452488U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6452488U priority Critical patent/JPH01169024U/ja
Publication of JPH01169024U publication Critical patent/JPH01169024U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6452488U 1988-05-18 1988-05-18 Pending JPH01169024U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6452488U JPH01169024U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6452488U JPH01169024U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Publications (1)

Publication Number Publication Date
JPH01169024U true JPH01169024U (enrdf_load_stackoverflow) 1989-11-29

Family

ID=31289988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6452488U Pending JPH01169024U (enrdf_load_stackoverflow) 1988-05-18 1988-05-18

Country Status (1)

Country Link
JP (1) JPH01169024U (enrdf_load_stackoverflow)

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