JPH01168873U - - Google Patents

Description

[Brief explanation of the drawing]

Figures 1 to 3 show a first embodiment of the piezoelectric mechanical quantity sensor according to this invention, with Figure 1 being a longitudinal sectional view and Figure 2 showing the upper half of the housing removed. A plan view, FIG. 3 is a vertical cross-sectional view of a main part showing a modified example of the fixing means for the mass body, and FIGS. 4 to 7 show a second embodiment of this invention, and FIG. 4 is a vertical cross-sectional view. , Fig. 5 is a plan view of the housing with the upper half removed, Fig. 6 is a characteristic diagram showing the amplitude characteristics of the thin metal plate at the resonance frequency when the damping coefficient ratio is used as a parameter, and Fig. 7 is a diagram showing the amplitude characteristics of the thin metal plate at the resonance frequency. A waveform diagram showing an acceleration waveform applied to a piezoelectric diaphragm at a resonant frequency, and FIG. 8 is a vertical cross-sectional view showing a part where a mass body is attached in a conventional piezoelectric mechanical quantity sensor. 1: Housing, 2, 3: Piezoelectric element, 2a, 3a: Opening, 6: Metal thin plate (thin plate made of elastic material), 1
0: piezoelectric diaphragm, 12, 21: mass body.

Claims (1)

[Scope of utility model registration request] A piezoelectric diaphragm is formed by fixing a thin plate-like piezoelectric element having an opening in the center to a thin plate made of an elastic material, and a mass body is fixed to the thin plate at the opening of the piezoelectric element, and the area around the thin plate is 1. A piezoelectric dynamic quantity sensor, characterized in that a piezoelectric mechanical quantity sensor is formed by supporting a portion within a housing.