JPH01168551U - - Google Patents

Info

Publication number

JPH01168551U

JPH01168551U JP6330988U JP6330988U JPH01168551U JP H01168551 U JPH01168551 U JP H01168551U JP 6330988 U JP6330988 U JP 6330988U JP 6330988 U JP6330988 U JP 6330988U JP H01168551 U JPH01168551 U JP H01168551U

Authority

JP

Japan

Prior art keywords

substrate

sputtering

film

target material

view

Prior art date

1988-05-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 7
• 238000004544 sputter deposition Methods 0.000 claims description 5
• 239000013077 target material Substances 0.000 claims description 2
• 238000000151 deposition Methods 0.000 claims 1
• 239000011248 coating agent Substances 0.000 description 1
• 238000000576 coating method Methods 0.000 description 1

Cited By (4)