JPH01167036U - - Google Patents
Info
- Publication number
- JPH01167036U JPH01167036U JP6338588U JP6338588U JPH01167036U JP H01167036 U JPH01167036 U JP H01167036U JP 6338588 U JP6338588 U JP 6338588U JP 6338588 U JP6338588 U JP 6338588U JP H01167036 U JPH01167036 U JP H01167036U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- plasma processing
- mounting table
- processing apparatus
- pressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6338588U JPH01167036U (da) | 1988-05-16 | 1988-05-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6338588U JPH01167036U (da) | 1988-05-16 | 1988-05-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01167036U true JPH01167036U (da) | 1989-11-22 |
Family
ID=31288891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6338588U Pending JPH01167036U (da) | 1988-05-16 | 1988-05-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01167036U (da) |
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1988
- 1988-05-16 JP JP6338588U patent/JPH01167036U/ja active Pending