JPH01166081U - - Google Patents

Info

Publication number
JPH01166081U
JPH01166081U JP6461788U JP6461788U JPH01166081U JP H01166081 U JPH01166081 U JP H01166081U JP 6461788 U JP6461788 U JP 6461788U JP 6461788 U JP6461788 U JP 6461788U JP H01166081 U JPH01166081 U JP H01166081U
Authority
JP
Japan
Prior art keywords
hand
electromagnet
flange portion
side flange
permanent magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6461788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6461788U priority Critical patent/JPH01166081U/ja
Publication of JPH01166081U publication Critical patent/JPH01166081U/ja
Pending legal-status Critical Current

Links

JP6461788U 1988-05-17 1988-05-17 Pending JPH01166081U (US07709020-20100504-C00041.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6461788U JPH01166081U (US07709020-20100504-C00041.png) 1988-05-17 1988-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6461788U JPH01166081U (US07709020-20100504-C00041.png) 1988-05-17 1988-05-17

Publications (1)

Publication Number Publication Date
JPH01166081U true JPH01166081U (US07709020-20100504-C00041.png) 1989-11-21

Family

ID=31290082

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6461788U Pending JPH01166081U (US07709020-20100504-C00041.png) 1988-05-17 1988-05-17

Country Status (1)

Country Link
JP (1) JPH01166081U (US07709020-20100504-C00041.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417376U (US07709020-20100504-C00041.png) * 1990-05-30 1992-02-13
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0417376U (US07709020-20100504-C00041.png) * 1990-05-30 1992-02-13
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

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