JPH01165647U - - Google Patents
Info
- Publication number
- JPH01165647U JPH01165647U JP6207288U JP6207288U JPH01165647U JP H01165647 U JPH01165647 U JP H01165647U JP 6207288 U JP6207288 U JP 6207288U JP 6207288 U JP6207288 U JP 6207288U JP H01165647 U JPH01165647 U JP H01165647U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holder
- clamper
- holds
- holding mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207288U JPH0737318Y2 (ja) | 1988-05-13 | 1988-05-13 | 枚葉ウエハ処理装置用ウエハ保持機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6207288U JPH0737318Y2 (ja) | 1988-05-13 | 1988-05-13 | 枚葉ウエハ処理装置用ウエハ保持機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01165647U true JPH01165647U (en, 2012) | 1989-11-20 |
| JPH0737318Y2 JPH0737318Y2 (ja) | 1995-08-23 |
Family
ID=31287706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6207288U Expired - Lifetime JPH0737318Y2 (ja) | 1988-05-13 | 1988-05-13 | 枚葉ウエハ処理装置用ウエハ保持機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737318Y2 (en, 2012) |
-
1988
- 1988-05-13 JP JP6207288U patent/JPH0737318Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737318Y2 (ja) | 1995-08-23 |