JPH01165631U - - Google Patents
Info
- Publication number
- JPH01165631U JPH01165631U JP6120488U JP6120488U JPH01165631U JP H01165631 U JPH01165631 U JP H01165631U JP 6120488 U JP6120488 U JP 6120488U JP 6120488 U JP6120488 U JP 6120488U JP H01165631 U JPH01165631 U JP H01165631U
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- chip
- positions
- piezoelectric element
- positioning member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6120488U JPH01165631U (hu) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6120488U JPH01165631U (hu) | 1988-05-10 | 1988-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165631U true JPH01165631U (hu) | 1989-11-20 |
Family
ID=31286880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6120488U Pending JPH01165631U (hu) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165631U (hu) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009517233A (ja) * | 2005-11-30 | 2009-04-30 | シーメンス アクチエンゲゼルシヤフト | 機械要素ないし加工物の振動低下方法 |
| JP2017204569A (ja) * | 2016-05-11 | 2017-11-16 | 三益半導体工業株式会社 | 回転テーブル用ウェーハ保持機構及び方法並びにウェーハ回転保持装置 |
-
1988
- 1988-05-10 JP JP6120488U patent/JPH01165631U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009517233A (ja) * | 2005-11-30 | 2009-04-30 | シーメンス アクチエンゲゼルシヤフト | 機械要素ないし加工物の振動低下方法 |
| JP2017204569A (ja) * | 2016-05-11 | 2017-11-16 | 三益半導体工業株式会社 | 回転テーブル用ウェーハ保持機構及び方法並びにウェーハ回転保持装置 |