JPH01164760U - - Google Patents

Info

Publication number
JPH01164760U
JPH01164760U JP6176888U JP6176888U JPH01164760U JP H01164760 U JPH01164760 U JP H01164760U JP 6176888 U JP6176888 U JP 6176888U JP 6176888 U JP6176888 U JP 6176888U JP H01164760 U JPH01164760 U JP H01164760U
Authority
JP
Japan
Prior art keywords
ion
sample chamber
ion generation
chamber
generation chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6176888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6176888U priority Critical patent/JPH01164760U/ja
Publication of JPH01164760U publication Critical patent/JPH01164760U/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP6176888U 1988-05-11 1988-05-11 Pending JPH01164760U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6176888U JPH01164760U (US20100056889A1-20100304-C00004.png) 1988-05-11 1988-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6176888U JPH01164760U (US20100056889A1-20100304-C00004.png) 1988-05-11 1988-05-11

Publications (1)

Publication Number Publication Date
JPH01164760U true JPH01164760U (US20100056889A1-20100304-C00004.png) 1989-11-17

Family

ID=31287415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6176888U Pending JPH01164760U (US20100056889A1-20100304-C00004.png) 1988-05-11 1988-05-11

Country Status (1)

Country Link
JP (1) JPH01164760U (US20100056889A1-20100304-C00004.png)

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