JPH01164759U - - Google Patents
Info
- Publication number
- JPH01164759U JPH01164759U JP5975788U JP5975788U JPH01164759U JP H01164759 U JPH01164759 U JP H01164759U JP 5975788 U JP5975788 U JP 5975788U JP 5975788 U JP5975788 U JP 5975788U JP H01164759 U JPH01164759 U JP H01164759U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum evaporation
- chamber
- decompression
- replaced
- decompression chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 8
- 230000006837 decompression Effects 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 5
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975788U JPH0532534Y2 (sv) | 1988-05-02 | 1988-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975788U JPH0532534Y2 (sv) | 1988-05-02 | 1988-05-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01164759U true JPH01164759U (sv) | 1989-11-17 |
| JPH0532534Y2 JPH0532534Y2 (sv) | 1993-08-19 |
Family
ID=31285503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5975788U Expired - Lifetime JPH0532534Y2 (sv) | 1988-05-02 | 1988-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0532534Y2 (sv) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010038371A1 (ja) * | 2008-09-30 | 2010-04-08 | 積水化学工業株式会社 | 表面処理装置 |
-
1988
- 1988-05-02 JP JP5975788U patent/JPH0532534Y2/ja not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010038371A1 (ja) * | 2008-09-30 | 2010-04-08 | 積水化学工業株式会社 | 表面処理装置 |
| JP2010087077A (ja) * | 2008-09-30 | 2010-04-15 | Sekisui Chem Co Ltd | 表面処理装置 |
| JP4681640B2 (ja) * | 2008-09-30 | 2011-05-11 | 積水化学工業株式会社 | 表面処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0532534Y2 (sv) | 1993-08-19 |