JPH01164247U - - Google Patents

Info

Publication number
JPH01164247U
JPH01164247U JP5948788U JP5948788U JPH01164247U JP H01164247 U JPH01164247 U JP H01164247U JP 5948788 U JP5948788 U JP 5948788U JP 5948788 U JP5948788 U JP 5948788U JP H01164247 U JPH01164247 U JP H01164247U
Authority
JP
Japan
Prior art keywords
belt
semiconductor substrates
utility
scope
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5948788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5948788U priority Critical patent/JPH01164247U/ja
Publication of JPH01164247U publication Critical patent/JPH01164247U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
JP5948788U 1988-05-02 1988-05-02 Pending JPH01164247U (en))

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5948788U JPH01164247U (en)) 1988-05-02 1988-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5948788U JPH01164247U (en)) 1988-05-02 1988-05-02

Publications (1)

Publication Number Publication Date
JPH01164247U true JPH01164247U (en)) 1989-11-16

Family

ID=31285245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5948788U Pending JPH01164247U (en)) 1988-05-02 1988-05-02

Country Status (1)

Country Link
JP (1) JPH01164247U (en))

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