JPH01163719U - - Google Patents

Info

Publication number

JPH01163719U

JPH01163719U JP1988061998U JP6199888U JPH01163719U JP H01163719 U JPH01163719 U JP H01163719U JP 1988061998 U JP1988061998 U JP 1988061998U JP 6199888 U JP6199888 U JP 6199888U JP H01163719 U JPH01163719 U JP H01163719U

Authority

JP

Japan

Prior art keywords

chamber

filter

air

air supply

return air

Prior art date

1988-05-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 230000007246 mechanism Effects 0.000 claims description 4
• 238000003303 reheating Methods 0.000 claims description 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
• 238000011045 prefiltration Methods 0.000 claims 2
• 238000009423 ventilation Methods 0.000 claims 2
• 230000030279 gene silencing Effects 0.000 claims 1
• 238000002955 isolation Methods 0.000 claims 1
• 238000005192 partition Methods 0.000 claims 1
• 238000007664 blowing Methods 0.000 description 2

Cited By (1)