JPH01163536U - - Google Patents
Info
- Publication number
- JPH01163536U JPH01163536U JP6152288U JP6152288U JPH01163536U JP H01163536 U JPH01163536 U JP H01163536U JP 6152288 U JP6152288 U JP 6152288U JP 6152288 U JP6152288 U JP 6152288U JP H01163536 U JPH01163536 U JP H01163536U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- exhaust
- water droplet
- processing
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152288U JPH059080Y2 (sh) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6152288U JPH059080Y2 (sh) | 1988-05-10 | 1988-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01163536U true JPH01163536U (sh) | 1989-11-15 |
| JPH059080Y2 JPH059080Y2 (sh) | 1993-03-05 |
Family
ID=31287187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6152288U Expired - Lifetime JPH059080Y2 (sh) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059080Y2 (sh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017002640A (ja) * | 2015-06-12 | 2017-01-05 | Ykk Ap株式会社 | 断熱ドア |
-
1988
- 1988-05-10 JP JP6152288U patent/JPH059080Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017002640A (ja) * | 2015-06-12 | 2017-01-05 | Ykk Ap株式会社 | 断熱ドア |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059080Y2 (sh) | 1993-03-05 |