JPH01161326U - - Google Patents
Info
- Publication number
- JPH01161326U JPH01161326U JP5685688U JP5685688U JPH01161326U JP H01161326 U JPH01161326 U JP H01161326U JP 5685688 U JP5685688 U JP 5685688U JP 5685688 U JP5685688 U JP 5685688U JP H01161326 U JPH01161326 U JP H01161326U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- furnace core
- core tube
- quartz
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 238000002485 combustion reaction Methods 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 claims 1
- 238000007254 oxidation reaction Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5685688U JPH01161326U (de) | 1988-04-26 | 1988-04-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5685688U JPH01161326U (de) | 1988-04-26 | 1988-04-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01161326U true JPH01161326U (de) | 1989-11-09 |
Family
ID=31282717
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5685688U Pending JPH01161326U (de) | 1988-04-26 | 1988-04-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01161326U (de) |
-
1988
- 1988-04-26 JP JP5685688U patent/JPH01161326U/ja active Pending