JPH01159566A - Device for maintenance operation of cryogenic refrigerator - Google Patents

Abstract

PURPOSE: To sustain a good atmosphere at the time of maintenance work of a refrigerating machine, or the like, by arranging a container surrounding the driving section of a refrigerating machine and providing means for removing impurities in the container. CONSTITUTION: Maintenance work in a refrigerating machine 2 is conducted by removing only a driving section 9 with the cylinder 10 of the refrigerating machine 2 being fixed to a cryostat 1. The driving section 9 is entirely surrounded by the casing 17 of a maintenance work unit such that a gas can not be conducted. It is then evacuated by an evacuating means 40 until impurity gas, e.g. the air, is eliminated and then filled with a gas, e.g. helium, by a gas supply mechanism 41. Since a good gas atmosphere is held, maintenance work can be carried out while keeping a good atmosphere of the refrigerating machine 2 externally through globes 20.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a maintenance device for a cryogenic refrigeration system, and particularly to measures for improving the atmosphere inside the cryogenic refrigeration system during maintenance work.

(Prior Art) Conventionally, as a general structure of a cryogenic refrigeration device, for example, as disclosed in Japanese Patent Application Laid-Open No. 61-289274,
A cryostat with a built-in low-temperature liquefied gas such as helium is equipped with a refrigerator to maintain the cryostat in an extremely low temperature state, and when performing maintenance work on the cryocooler, the entire refrigerator must be removed from the cryostat. There is something I did.

Furthermore, as disclosed in Japanese Utility Model Application Publication No. 62-115064, the cylinder part of the refrigerator and the drive part of the refrigerator, which are taken out facing inside the taliostat, can be removed, and the cylinder part A gas injection device such as helium is attached to the cryogenic refrigeration equipment, and when performing maintenance work on the cryogenic refrigeration equipment, the atmosphere inside the cryogenic refrigeration equipment can be reduced by leaving the cylinder part as it is and removing only the drive part while injecting gas. There are things that we try to maintain in good condition.

(Problem to be solved by the invention) However, in the former of the above publications, external air etc. enters the cryostat from the place where the refrigerator is removed and adheres to the inside, resulting in contamination of the inside of the device. There is a problem with being exposed.

In order to prevent the above-mentioned contamination, the mounting portion of the refrigerator must be sealed, which complicates the structure.

In addition, in the latter case, since the work is carried out with the cylinder section attached to the cryostat, there is no problem as described above. However, if only the shutoff is performed by injecting a gas such as helium, the gas atmosphere will be broken when maintenance parts and tools are brought in from outside, so there is still a problem that air, moisture, etc. will enter and adhere to the cylinder.

In view of these points, the first object of the present invention is to arrange a container surrounding the driving part of the refrigerator, and to take measures to remove impurities in the container, thereby reducing the The goal is to maintain a good atmosphere during maintenance work.

A second object of the invention is to improve the atmosphere inside the apparatus during maintenance work by separating the low-temperature liquefied gas from impurities such as air and moisture within the container.

Furthermore, air, moisture, etc. are usually attached to the surfaces of tools, replacement parts, etc. used for maintenance work on cryogenic refrigeration equipment, and this becomes a factor that contaminates the equipment during work.

In view of this, it is an object of the third invention to prevent contamination of cryogenic refrigeration equipment by work tools and the like during maintenance work by attaching a storage container for tools and the like in addition to the main body of the equipment for maintenance work. It's about doing.

Furthermore, when parts within the cryogenic refrigeration system are replaced with new ones, there is a risk that the new parts to be replaced will be contaminated by the old parts that have been removed.

In view of this, the fourth object of the invention is to provide a container having two chambers for storing old and new parts in addition to the main body of the apparatus for maintenance work, thereby preventing old parts from replacing new parts during maintenance work. The goal is to prevent pollution.

(Means for solving the problem) In order to achieve the above object, the first means for solving the problem is as shown in FIG. A refrigerator (2), and the refrigerator (2) has a drive unit (9) that is placed outside the cryostat (1) and adiabatically expands a low-temperature liquefied gas such as helium, and a main body that is connected to the cryostat (1). The present invention is based on a cryogenic refrigeration system consisting of a cylinder part (10) which faces the interior of the cylinder (10) and is removably installed from the drive part (9).

The cryostat (1) of the cylinder part (10) is installed as a maintenance work device for the cryogenic refrigeration equipment.
a pressure-resistant casing (17) that is attached to the outside and surrounds the drive unit (9) so that gas cannot flow with the outside;
Attached to the casing (17), the casing (17)
Gloves (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and the casing (1).
7) A gas supply mechanism (41) for supplying low temperature liquefied gas to the inside is provided.

Further, a vacuum evacuation means (40) for evacuating the inside of the casing (17) is provided.

Furthermore, the second solution is based on the same cryogenic refrigeration device as the first solution.

The cryostat (1) of the cylinder part (10) is installed as a maintenance work device for the cryogenic refrigeration equipment.
a pressure-resistant casing (17) that is attached to the outside and surrounds the drive unit (9) so that gas cannot flow with the outside;
Attached to the casing (17), the casing (17)
Gloves (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and the casing (1).
7) A gas supply mechanism (41) for supplying low temperature liquefied gas to the inside is provided.

Further, the casing (17) is provided with an impurity storage section (27) in which impurity gas can be retained based on the difference in specific gravity with the low-temperature liquefied gas.

Furthermore, the third solution is based on the same cryogenic refrigeration device as the first solution.

The cryostat (1) of the cylinder part (10) is installed as a maintenance work device for the cryogenic refrigeration equipment.
a pressure-resistant casing (17) that is attached to the outside and surrounds the drive unit (9) so that gas cannot flow with the outside;
Attached to the casing (17), the casing (17)
Gloves (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and the casing (1).
7) A gas supply mechanism (41) for supplying low temperature liquefied gas to the inside is provided.

Furthermore, during maintenance work, the above casing (17
) inside the casing (1) during maintenance.
7) Provide a storage container (42) for storing new parts and tools brought into the interior, and use the storage container (42) to open and close the airtight room (R) and the airtight room (R). a lid (30) for removing air, and an air removal means (4) for removing air from inside the airtight chamber (R).
3).

Furthermore, the fourth solution is based on the same cryogenic refrigeration device as the first solution.

The cryostat (1) of the cylinder part (10) is installed as a maintenance work device for the cryogenic refrigeration equipment.
a pressure-resistant casing (17) that is attached to the outside and surrounds the drive unit (9) so that gas cannot flow with the outside;
Attached to the casing (17), the casing (17)
Gloves (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and the casing (1).
7) A gas supply mechanism (41) for supplying low temperature liquefied gas to the inside is provided.

Furthermore, during maintenance work, the above casing (1
7) Charged inside the casing (
17) A storage container (4) for storing new parts to be brought into the
4A) and a storage container (44B) for storing the old parts to be removed, and each storage container (44A), (44
B), parts clothing/utilization airtight room (RA), (RB
), lids (30A) and (30B) for opening and closing the multiple airtight chambers (RA) and (RB), respectively, and air removal means (45A) for removing each airtight chamber (RA) and (Ra), respectively.

(45B).

(Function) With the above configuration, in the first invention, only the drive unit (9) is removed while the cylinder part (10) of the refrigerator (2) is attached to the cryostat (1), and the cylinder part (10) of the refrigerator (2) is removed. ) Internal maintenance work is carried out.

In that case, the entire drive part (9) is surrounded by the casing (17) of the maintenance work device, preventing gas from flowing.
Moreover, after the inside of the device is made into a vacuum state free of impurity gases such as air by the vacuum evacuation means (40), the inside is filled with gas such as helium by the gas supply mechanism (41), so that a good gas atmosphere is created. is retained. Therefore, the refrigerator (
Maintenance work will be carried out while maintaining a good atmosphere in 2).

Further, in the second invention, during similar maintenance work, the entire drive part (9) is surrounded by the casing (17) of the maintenance work device so that gas cannot flow therein, and the gas is not allowed to flow inside the casing (17). Since the impurity storage section (27) is provided based on the difference in specific gravity, for example, in the case of a refrigerant (such as helium) having a smaller specific gravity than air, air, Impurities such as moisture are moved and retained, improving gas purity near maintenance work areas. Therefore, contamination within the cryogenic refrigeration equipment is prevented as much as possible.

In the third invention, tools, parts, etc. are stored in advance in the airtight chamber (R) of the storage container (42), and the air removing means (42) is
After the internal air that becomes an impurity is removed by 3),
of equipment for maintenance work.

Since maintenance work is performed within the casing (17), contamination of the inside of the cryogenic refrigeration equipment by tools, parts, etc. is effectively prevented.

Furthermore, in the fourth invention, one storage container (44A
), the new parts for replacement are stored in the airtight chamber (RA) of the other storage container (44B), while the airtight chamber (RB) of the other storage container (44B) remains empty, and the air removal means (45) removes each chamber (RA), ( R.B.
) is removed, and during maintenance work inside the casing (17), the old parts are placed in an airtight chamber (RB
) After the new parts are stored in the airtight chamber (RA), they are removed from the airtight room (RA), thereby effectively preventing contamination of the new parts by dust generated from the old parts.

(Embodiments of the first invention) Hereinafter, the embodiments of the first invention will be explained as shown in FIGS. 1 and 3.
This will be explained based on the diagram.

FIG. 1 shows the overall configuration of a cryogenic refrigerator to which the first invention is applied, in which (1) is a cryostat, (2) is a refrigerator for maintaining the inside of the cryostat (1) at a cryogenic temperature, and ( 3) is a substantially rectangular parallelepiped glove box made of a steel plate and serving as a maintenance work device.

The cryostat (1) has a helium tank (5) that stores liquid helium inside the outer wall (4) that is maintained at about 300K.
between the helium tank (5) and the outer wall (4),
Starting from the outside, the first radiation shield (6) is maintained at approximately 70K with liquid nitrogen and radiation-seals the helium tank (5).
) and a second radiation shield (7) that is maintained at about 20K and radiation-seals the helium tank (5), and between the outer wall (4) and each radiation shield (6), (7) is provided. It is kept in a vacuum state.

The refrigerator (2) has a drive unit (9) that adiabatically expands low-temperature liquefied gas such as helium, and the drive unit (9) is removably provided, and the low-temperature gas is driven by the drive unit (9). The cryostat (
1) A cylinder part (10) that maintains the inside at an extremely low temperature. Here, the cylinder part (10) is
a flange (11) that is only partially disposed outside the cryostat (1); a cylindrical first cylinder (12) that extends vertically below the flange (11) into the inside of the cryostat (1); A first heat station (13) is provided at the lower end of the first cylinder (12) and is in contact with the first radiation shield (6) of the cryostat (1) to maintain the first radiation shield (6) at a predetermined temperature. ), a second cylinder (14) extending vertically below the first heat station (13), and a second cylinder (14) provided at the lower end of the second cylinder (14) and in contact with the second radiation shield (7). and a second heat station (15) that maintains the second radiation shield (7) at a predetermined temperature.

Further, the outer frame (9a) of the drive section (9) of the refrigerator (2) is placed on the flange (11) of the cylinder section (10), and can be assembled and removed at this portion.

In addition, the flange (11) and the cryostat outer wall (4
), there is a seal (1
6) is provided.

The casing (17) of the glove box (3) is attached to the flange (11) of the cylinder part (10) through the seal ring (19) at the outer diameter part of the flange (11) at its attachment port (18). The drive unit (9) is surrounded by the drive unit (9) while being sealed to prevent gas from flowing to the outside.

The casing (17) has a substantially rectangular parallelepiped shape, and a glove (20) for performing maintenance work from the outside is integrally provided on the upper surface of the casing (17). Furthermore, a gas supply pipe (25) for supplying helium gas into the casing (17) from the outside is provided on the side of the casing (17), and the gas supply pipe (25) is interposed and is opened when gas is supplied. The glove box (3) is equipped with an on-off valve (26) which is manually operated to close the gas supply pipe (25) and the on-off valve (26).
A gas supply mechanism (41) is configured to supply a low-temperature liquefied gas such as helium.

As a feature of the present invention, the casing (17)
Below the gas supply mechanism (40) on the side surface of the casing (17) is a vacuum pump (22) for drawing gas in the casing (17), and a vacuum pump (22) connected to the casing (17).
7) is provided with a vacuum piping (23) that connects the gas supply mechanism (23) so that the interior thereof can be evacuated, and a manual on-off valve (24) interposed in the piping (23). 4
Before supplying the low temperature liquefied gas into the casing (17) according to step 1), the inside of the casing (17) is evacuated to remove impurities. The above vacuum pump (22
), the piping (23), and the on-off valve (24) constitute a vacuum evacuation means (40) for evacuating the inside of the casing (17).

Next, we will explain the procedure for maintenance work such as replacing parts when using the cryostat (1).
The glove box (3) is attached to the flange (11) of the cylinder part (10), the on-off valve (26) is closed and the on-off valve (24) is opened, and the vacuum pump (22) is used to connect the piping (
23) to create a vacuum inside the casing (17).

When the inside of the casing (17) is sufficiently vacuumed, the on-off valve (24) is closed and the on-off valve (26) is opened to supply helium gas from the pipe (25) into the casing (17). Fill the inside with helium gas. Thereafter, the driving part (9) of the refrigerator (2) is removed from the cylinder part (10) by hand using the glove (20) to perform maintenance work on the cryogenic freezing apparatus.

Therefore, in the above embodiment, when performing maintenance work on the cryogenic refrigeration equipment, it is not necessary to remove the entire refrigerator (2) from the cryostat (1), and therefore the vacuum state inside the cryostat (1) can be maintained. can be held as is, so the inside of a cryogenic freezing device such as a cryostat will not be contaminated with impurities such as air or moisture. Further, the entire drive section (9) of the refrigerator (2) is surrounded by the casing (17) of the glove box (3) so that no gas can flow therein, and the inside thereof is evacuated by the vacuum evacuation means (40) to remove impurities. After removing the causing air, moisture, etc., the gas supply mechanism (41) supplies helium gas, so the inside of the casing (17) is filled with high-purity helium gas, allowing maintenance work to be carried out in an atmosphere with almost no impurities. It can be performed. Therefore, contamination inside the cryogenic refrigeration equipment can be effectively prevented. Further, by repeating evacuation and gas supply in the casing (11) two or more times, the internal gas purity can be further improved.

In the above embodiment, the casing (17) of the maintenance work device was formed of a substantially rectangular parallelepiped steel plate, but the present invention is not limited to such a structure.
As shown in the figure, a so-called glove bag (3') is made of a bag-like casing (17') made of resin, and a vacuum means (40) and a gas supply mechanism (41) are installed in the glove bag (3'). It goes without saying that it is also possible to provide a.

Further, the same applies when the refrigerator (2) is installed horizontally or upward.

(Embodiment of the second invention) Next, regarding the embodiment of the second invention, FIGS.
This will be explained based on the diagram.

FIG. 2 shows the overall configuration of a cryogenic refrigeration system to which the second invention is applied. In Figure 2, the casing (17) of the glove box (3) as a maintenance work device is shown.
The impurity storage part (2) is formed by extending a part of the part downward.
7) is formed, and impurities such as air and moisture, which are heavier than helium gas, move downward and stay in the reservoir (27), causing damage to the area near the maintenance work area in the glove box (3). The atmosphere is better maintained.

Therefore, in the present invention, the impurity storage section (27) formed by extending a part of the casing (17) downward is provided below the casing (17) of the glove box (3). Impurities heavier than helium, such as air and moisture, move downward and stay there, so the impurity concentration near the maintenance work area inside the casing (17) becomes lower, making it more effective to prevent contamination inside the cryogenic refrigeration equipment during work. can be prevented.

In the figure, the other configurations are the same as in the case of FIG. 1 above. However, the evacuation means (40) is not necessarily necessary.

Furthermore, as shown in FIG. 4, in the present invention, as in the case of the first invention, a glove bag (3') is used in place of the glove box (3), and impurities accumulate below the glove bag (3'). A section (27') may be provided.

Furthermore, when the present invention is applied to an apparatus using a low-temperature liquefied gas having a higher specific gravity than air, such as argon gas,
By providing the impurity storage part (2'7) extending above the casing (17), impurities such as air, which is lighter than argon gas, can be moved upward, and the same effect as in the above embodiment is achieved. Get the effect.

(Embodiment of the third invention) Next, an embodiment of the third invention will be described based on FIGS. 1, 5, and 6.

FIG. 5 relates to an embodiment of the present invention, which is inserted into the casing (17) of a cryogenic freezing apparatus having the same configuration as the first invention, and is inserted into the casing (17) of the cryogenic freezing apparatus during maintenance work of the cryogenic freezing apparatus. The configuration of a storage container (42) for storing new parts and tools brought into the casing (17) is shown.

In the figure, (28) is a frame forming an airtight chamber (R), (
30) is attached to the frame (28), and the airtight chamber (
R) is the lid that opens and closes, (29) is the frame (28) and the lid (
A seal ring provided at the contact part with (30), (31)
(32) is a manual on-off valve installed in the gas supply pipe (31); 31) and the on-off valve (32) constitute an air removal means (43) that removes the air inside the airtight chamber (R) by replacing the air in the airtight chamber (R) with low-temperature liquefied gas.

The main body of the apparatus for maintenance work in this embodiment is the same as that shown in FIG. After storing new parts, tools, etc., and removing the internal air by replacing it with low-temperature liquefied gas using the air removal means (43), carry it into the glove box (3) of the main body of the work equipment for maintenance work. will be carried out.

Therefore, in this embodiment, the air inside the container (42) for storing replacement parts, tools, etc. is removed in advance and replaced with low-temperature liquefied gas, so that the atmosphere in the glove box (3) during maintenance work is reduced. Maintenance work can be performed without contaminating the cryogenic refrigeration equipment, and therefore, it is possible to effectively prevent contamination of the inside of the cryogenic refrigeration equipment by parts, tools, etc. brought in.

In addition, in the above embodiment, as the air removal means (43),
A mechanism for supplying low-temperature liquefied gas into the airtight chamber' (R) was provided, but a vacuum evacuation mechanism such as a vacuum pump was used as the air removal means (43) to evacuate the air in the airtight chamber (R) in advance. Remove with Glovehox (3
) A low-temperature liquefied gas such as helium may be introduced into the airtight chamber (R).

In addition, as shown in FIG. 6, the storage container (42') is equipped with a vacuum piping (33) and an on-off valve (34) in addition to the gas supply pipe (31) and on-off valve (32). An air removal means (43') may be provided, and the low temperature liquefied gas may be supplied after the parts and the like are previously housed in the airtight chamber (R) and evacuated.

In addition, in the present invention, the evacuation means (40
) is not necessarily required.

(Embodiment of the fourth invention) Next, an embodiment of the fourth invention will be described based on FIGS. 1 and 7.

FIG. 5 shows an embodiment of the present invention, which is inserted into a casing (17) of a cryogenic refrigeration apparatus having the same configuration as the first invention, during maintenance work of the cryogenic refrigeration apparatus. (17) The structure of a storage chamber (44A) for storing new parts to be brought into the interior and a storage container (44B) for storing old parts to be removed is shown. In the figure, (RA) and (RB) are the airtight chambers for storage of the storage containers (44A) and (44B), respectively, and (35) are the two airtight chambers (RA) and (Ra
), (30A), (
30B) is a lid for opening and closing each airtight chamber (RA), (RB), (29A), (29B) is a seal ring, (31A), (31B) is each airtight chamber (RA).

Gas supply pipe that supplies low-temperature liquefied gas to (Ra), (32
A), (32B) are on-off valves, and each gas supply pipe (31A), (31B) and on-off valve (32A)
, (32B), two airtight chambers (RA),
Air removal means (45
A) and (45B) are respectively configured.

The structure of the main body of the working device in this embodiment is the same as that shown in FIG.
) in the airtight room (RA) and the other storage container (44B).
) air removal means (45A) without storing anything in the airtight chamber (RB).

By (45B), both chambers (RA), (RB)
is replaced in advance with a low-temperature liquefied gas such as helium. And a storage container (44A) in the glove box (3),
(44B), the interior of the glove box (3) is replaced with helium, the old parts to be replaced are stored in the airtight chamber (RB), and the lid (30B) is closed. Then, the inside of the glow box (3) is replaced with helium again, and then the new parts are taken out from the airtight room (RA) and installed. Perform maintenance work using the above steps.

Therefore, in this embodiment, since the space for housing new parts and old parts is separated, in addition to the effect of the third invention, dust from old parts removed from the device when replacing parts can cause damage to new parts. This means that contamination can be effectively prevented.

In addition, in the said Example, a storage container (44A).

Although the container (44B) is made integral with the common frame (35), it goes without saying that two separate containers may be used.

In addition, in the present invention, as in the third invention, a vacuum evacuation mechanism alone or a combination of a gas supply mechanism and a vacuum evacuation mechanism may be used as the air removal means (45A) and (45B). Needless to say, it's a good thing.

Also, in the present invention, the evacuation means (40) of the first invention shown in FIG. 1 is not necessarily required.

(Effects of the Invention) As explained above, according to the apparatus for maintenance work of a cryogenic refrigeration equipment of the present invention, as an effect of the first invention, the cylinder part and the drive part are removable for a refrigerator.
The driving part of the refrigerator is hermetically surrounded by a casing, allowing low-temperature liquefied gas to be supplied inside the casing, and the inside of the casing being evacuated, making it possible to sufficiently remove impurities inside the equipment. Contamination of equipment during work can be effectively prevented.

In addition, as an effect of the second invention, since an impurity storage part based on the difference in specific gravity of gas is provided in a part of the maintenance work equipment, impurities in the maintenance work area can be removed by allowing the impurities in the equipment to stay in a part of the equipment. The concentration can be reduced as much as possible, thus preventing contamination of the equipment during operation.

Furthermore, according to the third invention, a storage container for storing replacement parts, tools used for maintenance, etc. is separately provided, and the air inside the storage container is removed in advance, so that the equipment using parts, tools, etc. can prevent contamination.

Further, according to the fourth invention, a chamber for storing new parts for replacement and a chamber for storing old parts to be replaced are provided, and the air in each chamber is removed, so that the old parts It is possible to effectively prevent contamination of new parts due to

[Brief explanation of the drawing]

The drawings show embodiments of the present application, and FIG. 1 is a configuration diagram of a device main body according to a common embodiment of the first, third, and fourth inventions. FIG. 2 is a configuration diagram of the apparatus main body according to the second embodiment of the invention. FIG. 3 shows an embodiment of the first invention and is a diagram showing another example of a maintenance work device. FIG. 4 shows an embodiment of the second invention, and is a diagram showing another example of a maintenance work device. 5 and 6 show an embodiment of the fourth invention, FIG. 5 is a configuration diagram of the storage container, and FIG.
The figure shows another example of the storage container. FIG. 7 shows an embodiment of the fourth invention, and is a configuration diagram of a storage container. (1) Cryostat, (2) Refrigerator,
Glove box (maintenance work equipment), (1
7)...Casing, (20)...Glove, (2
7)... Impurity storage section, (40)... Vacuuming means, (41)... Gas supply mechanism, (42), (4
4A), (44B)...Storage container, (43),
(45A), (45B)... air removal means, (
R), (RA), (RB)...Airtight room, (30)
, (30A). (30B)...Lid. Patent applicant: Daikin Industries, Ltd. Figure 7 (Monthly 2? # indicates μ) 43 (Removal of λ)

Claims (4)

[Claims] (1) Cryostat (1) and the cryostat (
a refrigerator (2) for maintaining the cryostat (1) at an extremely low temperature;
1), a drive unit (9) that adiabatically expands low-temperature liquefied gas such as helium, and a cryostat (1) that
), and a cylinder part (10) which is removably installed from the drive part (9), and a cryostat (10) located outside the cryostat (1) of the cylinder part (10). Attached and said drive part (9)
A casing (17
), attached to the casing (17), and the casing (
17) A glove (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and a gas supply mechanism (41) for supplying low-temperature liquefied gas to the inside of the casing (17), The above casing (
vacuum evacuation means (40) for evacuation of the inside of the
) A maintenance work device for cryogenic refrigeration equipment. (2) Cryostat (1) and the cryostat (
a refrigerator (2) for maintaining the cryostat (1) at an extremely low temperature;
1), a drive unit (9) that adiabatically expands low-temperature liquefied gas such as helium, and a cryostat (1) that
), and a cylinder part (10) which is removably installed from the drive part (9), and a cryostat (10) located outside the cryostat (1) of the cylinder part (10). Attached and said drive part (9)
A casing (17
), attached to the casing (17), and the casing (
17) A glove (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and a gas supply mechanism (41) for supplying low-temperature liquefied gas to the inside of the casing (17), The above casing (
17) is provided with an impurity storage section (27) capable of retaining impurity gas based on the difference in specific gravity with low-temperature liquefied gas. (3) Cryostat (1) and the cryostat (
a refrigerator (2) for maintaining the cryostat (1) at an extremely low temperature;
1), a drive unit (9) that adiabatically expands low-temperature liquefied gas such as helium, and a cryostat (1) that
), and a cylinder part (10) which is removably installed from the drive part (9), and a cryostat (10) located outside the cryostat (1) of the cylinder part (10). Attached and said drive part (9)
A casing (17
), attached to the casing (17), and the casing (
17) A glove (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and a gas supply mechanism (41) for supplying low-temperature liquefied gas to the inside of the casing (17), A storage container (42) is provided for storing new parts and tools that are inserted into the casing (17) and brought into the casing (17) during maintenance work, and the storage container (42) includes: An airtight room (R) for storage, and an airtight room (R) for storage.
An apparatus for maintenance work of a cryogenic refrigeration equipment, characterized in that it has a lid (30) for opening and closing the airtight chamber (R), and an air removal means (43) for removing air from the airtight chamber (R). (4) Cryostat (1) and the cryostat (
a refrigerator (2) for maintaining the cryostat (1) at an extremely low temperature;
1), a drive unit (9) that adiabatically expands low-temperature liquefied gas such as helium, and a cryostat (1) that
), and a cylinder part (10) which is removably installed from the drive part (9), and a cryostat (10) located outside the cryostat (1) of the cylinder part (10). Attached and said drive part (9)
A casing (17
), attached to the casing (17), and the casing (
17) A glove (20) for performing maintenance work from the outside while maintaining the internal atmosphere, and a gas supply mechanism (41) for supplying low-temperature liquefied gas to the inside of the casing (17), A storage container (44A) for storing new parts inserted into the casing (17) and brought into the casing (17) during maintenance work, and a storage container (44A) for storing old parts to be removed. Each of the storage containers (44A) and (44B) includes a component storage airtight chamber (R_A) and (R_B), and each of the airtight chambers (R_A) and (
Lid (30A), (30B) to open and close R_B) respectively
and air removal means (45A) and (45B) for removing air in each of the airtight chambers (R_A) and (R_B), respectively.