JPH01159353U - - Google Patents
Info
- Publication number
- JPH01159353U JPH01159353U JP5487788U JP5487788U JPH01159353U JP H01159353 U JPH01159353 U JP H01159353U JP 5487788 U JP5487788 U JP 5487788U JP 5487788 U JP5487788 U JP 5487788U JP H01159353 U JPH01159353 U JP H01159353U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- vicinity
- plasma generation
- insulating ring
- source housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5487788U JPH01159353U (de) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5487788U JPH01159353U (de) | 1988-04-22 | 1988-04-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01159353U true JPH01159353U (de) | 1989-11-06 |
Family
ID=31280791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5487788U Pending JPH01159353U (de) | 1988-04-22 | 1988-04-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01159353U (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0531094U (ja) * | 1991-09-30 | 1993-04-23 | 日新電機株式会社 | イオン源チヤンバ |
| JP4649773B2 (ja) * | 2001-05-14 | 2011-03-16 | 株式会社デンソー | イオン注入機 |
| WO2019054111A1 (ja) * | 2017-09-14 | 2019-03-21 | 株式会社アルバック | イオン源及びイオン注入装置並びにイオン源の運転方法 |
-
1988
- 1988-04-22 JP JP5487788U patent/JPH01159353U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0531094U (ja) * | 1991-09-30 | 1993-04-23 | 日新電機株式会社 | イオン源チヤンバ |
| JP4649773B2 (ja) * | 2001-05-14 | 2011-03-16 | 株式会社デンソー | イオン注入機 |
| WO2019054111A1 (ja) * | 2017-09-14 | 2019-03-21 | 株式会社アルバック | イオン源及びイオン注入装置並びにイオン源の運転方法 |
| US10910192B2 (en) | 2017-09-14 | 2021-02-02 | Ulvac, Inc. | Ion source, ion implantation apparatus, and ion source operating method |