JPH01158962U - - Google Patents

Info

Publication number
JPH01158962U
JPH01158962U JP5509688U JP5509688U JPH01158962U JP H01158962 U JPH01158962 U JP H01158962U JP 5509688 U JP5509688 U JP 5509688U JP 5509688 U JP5509688 U JP 5509688U JP H01158962 U JPH01158962 U JP H01158962U
Authority
JP
Japan
Prior art keywords
waveguide means
electronic components
internal defects
detecting internal
convey
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5509688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5509688U priority Critical patent/JPH01158962U/ja
Publication of JPH01158962U publication Critical patent/JPH01158962U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP5509688U 1988-04-22 1988-04-22 Pending JPH01158962U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5509688U JPH01158962U (enExample) 1988-04-22 1988-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5509688U JPH01158962U (enExample) 1988-04-22 1988-04-22

Publications (1)

Publication Number Publication Date
JPH01158962U true JPH01158962U (enExample) 1989-11-02

Family

ID=31281000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5509688U Pending JPH01158962U (enExample) 1988-04-22 1988-04-22

Country Status (1)

Country Link
JP (1) JPH01158962U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62179661A (ja) * 1986-02-04 1987-08-06 Chiyoda Chem Eng & Constr Co Ltd アコ−ステイツクエミツシヨン用センサ−
JPS63153466A (ja) * 1986-12-18 1988-06-25 Matsushita Electronics Corp 半導体パツケ−ジのクラツク検出方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62179661A (ja) * 1986-02-04 1987-08-06 Chiyoda Chem Eng & Constr Co Ltd アコ−ステイツクエミツシヨン用センサ−
JPS63153466A (ja) * 1986-12-18 1988-06-25 Matsushita Electronics Corp 半導体パツケ−ジのクラツク検出方法

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