JPH01158641U - - Google Patents

Info

Publication number
JPH01158641U
JPH01158641U JP5423088U JP5423088U JPH01158641U JP H01158641 U JPH01158641 U JP H01158641U JP 5423088 U JP5423088 U JP 5423088U JP 5423088 U JP5423088 U JP 5423088U JP H01158641 U JPH01158641 U JP H01158641U
Authority
JP
Japan
Prior art keywords
filaments
gas
chamber
ionize
ionized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5423088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5423088U priority Critical patent/JPH01158641U/ja
Publication of JPH01158641U publication Critical patent/JPH01158641U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5423088U 1988-04-22 1988-04-22 Pending JPH01158641U (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5423088U JPH01158641U (US20100056889A1-20100304-C00004.png) 1988-04-22 1988-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5423088U JPH01158641U (US20100056889A1-20100304-C00004.png) 1988-04-22 1988-04-22

Publications (1)

Publication Number Publication Date
JPH01158641U true JPH01158641U (US20100056889A1-20100304-C00004.png) 1989-11-01

Family

ID=31280165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5423088U Pending JPH01158641U (US20100056889A1-20100304-C00004.png) 1988-04-22 1988-04-22

Country Status (1)

Country Link
JP (1) JPH01158641U (US20100056889A1-20100304-C00004.png)

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