JPH01157155U - - Google Patents
Info
- Publication number
- JPH01157155U JPH01157155U JP5088888U JP5088888U JPH01157155U JP H01157155 U JPH01157155 U JP H01157155U JP 5088888 U JP5088888 U JP 5088888U JP 5088888 U JP5088888 U JP 5088888U JP H01157155 U JPH01157155 U JP H01157155U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- solid substance
- temperature
- ion source
- item
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5088888U JPH0515712Y2 (https=) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5088888U JPH0515712Y2 (https=) | 1988-04-18 | 1988-04-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01157155U true JPH01157155U (https=) | 1989-10-30 |
| JPH0515712Y2 JPH0515712Y2 (https=) | 1993-04-26 |
Family
ID=31276915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5088888U Expired - Lifetime JPH0515712Y2 (https=) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0515712Y2 (https=) |
-
1988
- 1988-04-18 JP JP5088888U patent/JPH0515712Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0515712Y2 (https=) | 1993-04-26 |