JPH01156845U - - Google Patents
Info
- Publication number
- JPH01156845U JPH01156845U JP5364788U JP5364788U JPH01156845U JP H01156845 U JPH01156845 U JP H01156845U JP 5364788 U JP5364788 U JP 5364788U JP 5364788 U JP5364788 U JP 5364788U JP H01156845 U JPH01156845 U JP H01156845U
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- axis
- stage
- laser beam
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
Landscapes
- Machine Tool Sensing Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5364788U JPH01156845U (pl) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5364788U JPH01156845U (pl) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156845U true JPH01156845U (pl) | 1989-10-27 |
Family
ID=31279612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5364788U Pending JPH01156845U (pl) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156845U (pl) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157951A (ja) * | 1999-11-30 | 2001-06-12 | Univ Chuo | 逐次２点法による形状精度測定装置および逐次２点法による形状精度測定用レーザ変位計間隔測定方法 |
-
1988
- 1988-04-20 JP JP5364788U patent/JPH01156845U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001157951A (ja) * | 1999-11-30 | 2001-06-12 | Univ Chuo | 逐次２点法による形状精度測定装置および逐次２点法による形状精度測定用レーザ変位計間隔測定方法 |