JPH01156832U - - Google Patents

Info

Publication number
JPH01156832U
JPH01156832U JP5219488U JP5219488U JPH01156832U JP H01156832 U JPH01156832 U JP H01156832U JP 5219488 U JP5219488 U JP 5219488U JP 5219488 U JP5219488 U JP 5219488U JP H01156832 U JPH01156832 U JP H01156832U
Authority
JP
Japan
Prior art keywords
chuck
vacuum
plate
chuck plate
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5219488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0639869Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988052194U priority Critical patent/JPH0639869Y2/ja
Publication of JPH01156832U publication Critical patent/JPH01156832U/ja
Application granted granted Critical
Publication of JPH0639869Y2 publication Critical patent/JPH0639869Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1988052194U 1988-04-20 1988-04-20 真空チャック Expired - Lifetime JPH0639869Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988052194U JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988052194U JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Publications (2)

Publication Number Publication Date
JPH01156832U true JPH01156832U (US07166745-20070123-C00016.png) 1989-10-27
JPH0639869Y2 JPH0639869Y2 (ja) 1994-10-19

Family

ID=31278201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988052194U Expired - Lifetime JPH0639869Y2 (ja) 1988-04-20 1988-04-20 真空チャック

Country Status (1)

Country Link
JP (1) JPH0639869Y2 (US07166745-20070123-C00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011213042A (ja) * 2010-04-01 2011-10-27 Ihi Corp 真空吸着ステージ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694238U (US07166745-20070123-C00016.png) * 1979-12-18 1981-07-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694238U (US07166745-20070123-C00016.png) * 1979-12-18 1981-07-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011213042A (ja) * 2010-04-01 2011-10-27 Ihi Corp 真空吸着ステージ

Also Published As

Publication number Publication date
JPH0639869Y2 (ja) 1994-10-19

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