JPH01156548U - - Google Patents
Info
- Publication number
- JPH01156548U JPH01156548U JP5269788U JP5269788U JPH01156548U JP H01156548 U JPH01156548 U JP H01156548U JP 5269788 U JP5269788 U JP 5269788U JP 5269788 U JP5269788 U JP 5269788U JP H01156548 U JPH01156548 U JP H01156548U
- Authority
- JP
- Japan
- Prior art keywords
- map
- index
- wafer
- wafer prober
- starting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002950 deficient Effects 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 239000003550 marker Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5269788U JPH01156548U (enExample) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5269788U JPH01156548U (enExample) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156548U true JPH01156548U (enExample) | 1989-10-27 |
Family
ID=31278704
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5269788U Pending JPH01156548U (enExample) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156548U (enExample) |
-
1988
- 1988-04-19 JP JP5269788U patent/JPH01156548U/ja active Pending