JPH01156544U - - Google Patents
Info
- Publication number
- JPH01156544U JPH01156544U JP5383988U JP5383988U JPH01156544U JP H01156544 U JPH01156544 U JP H01156544U JP 5383988 U JP5383988 U JP 5383988U JP 5383988 U JP5383988 U JP 5383988U JP H01156544 U JPH01156544 U JP H01156544U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- parallel plate
- plate electrode
- seesaw
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004020 conductor Substances 0.000 claims description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5383988U JPH01156544U (fr) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5383988U JPH01156544U (fr) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156544U true JPH01156544U (fr) | 1989-10-27 |
Family
ID=31279798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5383988U Pending JPH01156544U (fr) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156544U (fr) |
-
1988
- 1988-04-20 JP JP5383988U patent/JPH01156544U/ja active Pending