JPH01156542U - - Google Patents

Info

Publication number
JPH01156542U
JPH01156542U JP5293088U JP5293088U JPH01156542U JP H01156542 U JPH01156542 U JP H01156542U JP 5293088 U JP5293088 U JP 5293088U JP 5293088 U JP5293088 U JP 5293088U JP H01156542 U JPH01156542 U JP H01156542U
Authority
JP
Japan
Prior art keywords
stage
substrate
high frequency
processing apparatus
processing gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5293088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5293088U priority Critical patent/JPH01156542U/ja
Publication of JPH01156542U publication Critical patent/JPH01156542U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP5293088U 1988-04-20 1988-04-20 Pending JPH01156542U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5293088U JPH01156542U (US06815460-20041109-C00097.png) 1988-04-20 1988-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5293088U JPH01156542U (US06815460-20041109-C00097.png) 1988-04-20 1988-04-20

Publications (1)

Publication Number Publication Date
JPH01156542U true JPH01156542U (US06815460-20041109-C00097.png) 1989-10-27

Family

ID=31278925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5293088U Pending JPH01156542U (US06815460-20041109-C00097.png) 1988-04-20 1988-04-20

Country Status (1)

Country Link
JP (1) JPH01156542U (US06815460-20041109-C00097.png)

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