JPH01156540U - - Google Patents
Info
- Publication number
- JPH01156540U JPH01156540U JP5296588U JP5296588U JPH01156540U JP H01156540 U JPH01156540 U JP H01156540U JP 5296588 U JP5296588 U JP 5296588U JP 5296588 U JP5296588 U JP 5296588U JP H01156540 U JPH01156540 U JP H01156540U
- Authority
- JP
- Japan
- Prior art keywords
- quartz tube
- cleaning
- holding table
- cleaning solution
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 3
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296588U JPH01156540U (enExample) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5296588U JPH01156540U (enExample) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156540U true JPH01156540U (enExample) | 1989-10-27 |
Family
ID=31278961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5296588U Pending JPH01156540U (enExample) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156540U (enExample) |
-
1988
- 1988-04-20 JP JP5296588U patent/JPH01156540U/ja active Pending