JPH01156540U - - Google Patents

Info

Publication number
JPH01156540U
JPH01156540U JP5296588U JP5296588U JPH01156540U JP H01156540 U JPH01156540 U JP H01156540U JP 5296588 U JP5296588 U JP 5296588U JP 5296588 U JP5296588 U JP 5296588U JP H01156540 U JPH01156540 U JP H01156540U
Authority
JP
Japan
Prior art keywords
quartz tube
cleaning
holding table
cleaning solution
cleaning device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5296588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5296588U priority Critical patent/JPH01156540U/ja
Publication of JPH01156540U publication Critical patent/JPH01156540U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP5296588U 1988-04-20 1988-04-20 Pending JPH01156540U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5296588U JPH01156540U (enrdf_load_stackoverflow) 1988-04-20 1988-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5296588U JPH01156540U (enrdf_load_stackoverflow) 1988-04-20 1988-04-20

Publications (1)

Publication Number Publication Date
JPH01156540U true JPH01156540U (enrdf_load_stackoverflow) 1989-10-27

Family

ID=31278961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5296588U Pending JPH01156540U (enrdf_load_stackoverflow) 1988-04-20 1988-04-20

Country Status (1)

Country Link
JP (1) JPH01156540U (enrdf_load_stackoverflow)

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