JPH01156437U - - Google Patents

Info

Publication number
JPH01156437U
JPH01156437U JP5244988U JP5244988U JPH01156437U JP H01156437 U JPH01156437 U JP H01156437U JP 5244988 U JP5244988 U JP 5244988U JP 5244988 U JP5244988 U JP 5244988U JP H01156437 U JPH01156437 U JP H01156437U
Authority
JP
Japan
Prior art keywords
sensor chip
diaphragm
support base
metal
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5244988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5244988U priority Critical patent/JPH01156437U/ja
Publication of JPH01156437U publication Critical patent/JPH01156437U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP5244988U 1988-04-19 1988-04-19 Pending JPH01156437U (US07345094-20080318-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5244988U JPH01156437U (US07345094-20080318-C00003.png) 1988-04-19 1988-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5244988U JPH01156437U (US07345094-20080318-C00003.png) 1988-04-19 1988-04-19

Publications (1)

Publication Number Publication Date
JPH01156437U true JPH01156437U (US07345094-20080318-C00003.png) 1989-10-27

Family

ID=31278448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5244988U Pending JPH01156437U (US07345094-20080318-C00003.png) 1988-04-19 1988-04-19

Country Status (1)

Country Link
JP (1) JPH01156437U (US07345094-20080318-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012242123A (ja) * 2011-05-16 2012-12-10 Yokogawa Electric Corp 振動式圧力トランスデューサ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012242123A (ja) * 2011-05-16 2012-12-10 Yokogawa Electric Corp 振動式圧力トランスデューサ

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