JPH01155194A - Heater for heat treating furnace - Google Patents

Abstract

PURPOSE: To easily increase and decrease incandescent zone by constituting the heater by joining a plurality of heater blocks which are divided correspondingly to a plurality of heating zones which is formed by dividing the heating zone of a heat-treating furnace. CONSTITUTION: A heater 2 is composed of quartered heater blocks 10a-10d which are formed correspondingly to a plurality of heating zones in a heat- treating furnace and, in each heater block 10a-10d, heater strands 5 are coated with a heat insulating material 6 in a case 11 and heater terminals 7 are lead out from the case 11. Each heater block 10a-10d has recessed and projecting step sections 12 and 13 for putting the block in its adjacent block. Therefore, the heater 2 can be assembled easily and incandescent zone can be changed easily by increasing the number of intermediate heater blocs 10b and 10c. Since the joints of the blocks 10a-10d are constructed in step structures, heat radiation from the joints can be prevented and a high heat retaining property can be secured.

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) This invention relates to a heating device for a heat treatment furnace, particularly a diffusion furnace, a CVD
The present invention relates to a heating device for a heat treatment furnace such as a furnace.

(Prior art) As a heat treatment furnace such as a diffusion furnace, conventionally, for example, the
Some devices have a configuration as shown in the figure.

That is, the reaction tube 1 is composed of a reaction tube 1 and a heater 2 arranged around the reaction tube 1, and a large number of semiconductor wafers 4 placed on a wafer holder 3 are inserted into the reaction tube 1, and the inside of the reaction tube 1 is evacuated. After that, the wafer 4 is subjected to heat treatment while the heater 2 is energized and the reaction gas is allowed to flow into the reaction tube 1.

In such a heat treatment furnace, uniformity of temperature is required over the entire area where the tubes and tubes 4 are placed, so basically the heater 2 is installed in zones 3 to 5 along the length of the reaction tube 1. The power is controlled for each zone so that each zone is heated evenly. That is, the heater 2 has a configuration in which a heater wire 5, which is a heating element, is covered with a heat insulating material 6, and the heater wire 5 is divided corresponding to the zones, and the heater terminal 7 is connected from the division point. is derived, and the temperature of each zone is determined by a phantom temperature sensor 8 such as a thermocouple.
It is monitored by the controller and fed back to the controller.

By the way, in recent years, there has been a demand for nine processing furnaces that can process tenri wafers at once, and this has created a need to increase the scorching heat area. It was difficult to find words to increase the area.

In addition, especially in the case of a vertical structure as shown in Figure 4, if the heater is made larger in order to process a larger number of wafers, the load applied to the heater wires at the bottom increases, causing the heater wires to deform and come into contact with each other. There was also the problem that reliability was lowered due to the occurrence of Furthermore, as the size of the heater increases, so does its weight, which poses a handling problem in that a crane is required for installation.

(Objective of the Invention) Therefore, the present invention makes it possible to easily increase or decrease the burning area, and, especially in the case of a vertical type, the reliability does not decrease even when the size is increased.
Another object of the present invention is to provide a heater for a heat treatment furnace that is easy to install.

(Structure of the Invention) The heater of the heat treatment furnace according to the present invention has i
It is characterized in that it consists of a heater block of Si number, and these heater blocks are joined to each other to constitute a heater.

(Effects of the Invention) According to the present invention, since the heater is constituted by a plurality of heater blocks, the scorching area can be easily increased or decreased by increasing or decreasing the number of intermediate heater blocks, and manufacturing, processing, and assembly are also facilitated. Furthermore, even with a vertical structure, reliability is improved because the load applied to the heater wires does not increase.

(Embodiments) Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an exploded sectional view of an embodiment in which the present invention is applied to a vertical furnace.

In the figure, the heater 2 consists of four heater blocks 10a-10d each corresponding to a plurality of heating zones in the heat treatment furnace.
0d, the heater wire 5 is connected to the broken track member 6 in the case 11.
Each heater block 10a to 10 has a configuration covered with
A heater terminal 7 is led out from d. Each heater block lOa to 10d is formed with an uneven stepped portion 12.13 for fitting with an adjacent heater block, and three heater blocks IOa to 10c, excluding the lowest heater block IOd, are formed in each heater block lOa to 10d. A convex step 12 is provided at the lower end of the
are formed respectively, and the heater block 1 at the top position is
A concave stepped portion 13 is formed at the upper end of the three heaters except 0a and Ob to 10d. In this way, in the wooden embodiment, the joining portions of the heater blocks 10a-10d have a stepped structure, so when assembling the heater 2, it is only necessary to stack the heater blocks 10a-10d.
Extremely easy to assemble. Furthermore, by increasing or decreasing the number of intermediate heater blocks IOb and IOC, it is possible to easily change the scorching area. Furthermore, since the joint portion has a stepped structure, heat radiation at the joint portion is prevented, and good heat retention can be ensured. In particular, in a vertical furnace, the load applied to the heater wire 5 is also reduced, and the
It is possible to aim for the direction of α-characteristics.

Next, FIG. 2 shows an exploded cross-sectional view of an embodiment in which the invention is applied to a vertical furnace, and the heater 2 is composed of four divided heater blocks 1oa-10d as in FIG. 1. The rest of the configuration is the same as that of the vertical type shown in FIG. 1, so redundant explanation will be omitted, but in the case of FIG. By connecting the protrusions 14 with bolts (not shown), the heater blocks 10a to 10d are integrally connected to form the heater 2.

FIG. 3 shows an electric circuit diagram for controlling the heater of the heat treatment furnace according to the present invention, 16 is a silisk for controlling the electric power supplied to each heater wire 5, 17 is a temperature controller, and the temperature of each heating zone is controlled by the temperature controller. The temperature monitored by the sensors 8a to 8d and the temperature detected by the temperature sensors 8a to 8d and the /l! set by the temperature setting section 18. ! Based on this comparison, the temperature controller 17 outputs a control signal to the gate 19 of the thyristor 16, thereby keeping each heater wire 5 at a constant temperature in each heating zone. The power is controlled so that the

[Brief explanation of the drawing]

Fig. 1 is an exploded sectional view of an embodiment in which the present invention is applied to a vertical furnace, Fig. 2 is an exploded sectional view of an embodiment in which the invention is applied to a vertical furnace, Fig. 3 is an electric circuit diagram, and Fig. 4 The figure is a cross-sectional view of a conventional vertical heat treatment furnace, and FIG. 5 is a cross-sectional view of the same horizontal heat treatment furnace. 2-Heater 5-Heater wire 6-@heat material
7- Heater terminal 8- Temperature sensor 10a-10d-... Heater block 12.13-
Stepped portion 14, series connection protrusion 16--Thyristor
17.--Temperature controller patent applicant Kokusai Denki Co., Ltd. Agent Patent attorney Toshihito Yamamoto Figure 1 Figure 4 Figure 5

Claims (1)

[Scope of Claims] 1. Consisting of a plurality of heater blocks that are divided to correspond to a plurality of divided heating zones in a heat treatment furnace and that can be moved toward and away from each other, and these heater blocks are joined to each other to constitute a heater. A heater for a heat treatment furnace characterized by: 2. The heater according to claim 1, wherein the heater block is provided with an uneven step portion for fitting into an adjacent heater block, and the heater block is joined at the step portion.