JPH01155162U - - Google Patents
Info
- Publication number
- JPH01155162U JPH01155162U JP4974688U JP4974688U JPH01155162U JP H01155162 U JPH01155162 U JP H01155162U JP 4974688 U JP4974688 U JP 4974688U JP 4974688 U JP4974688 U JP 4974688U JP H01155162 U JPH01155162 U JP H01155162U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing
- semiconductor wafer
- pasting
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000004744 fabric Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4974688U JPH01155162U (ru) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4974688U JPH01155162U (ru) | 1988-04-13 | 1988-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01155162U true JPH01155162U (ru) | 1989-10-25 |
Family
ID=31275829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4974688U Pending JPH01155162U (ru) | 1988-04-13 | 1988-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01155162U (ru) |
-
1988
- 1988-04-13 JP JP4974688U patent/JPH01155162U/ja active Pending