JPH01154632U - - Google Patents
Info
- Publication number
- JPH01154632U JPH01154632U JP5199188U JP5199188U JPH01154632U JP H01154632 U JPH01154632 U JP H01154632U JP 5199188 U JP5199188 U JP 5199188U JP 5199188 U JP5199188 U JP 5199188U JP H01154632 U JPH01154632 U JP H01154632U
- Authority
- JP
- Japan
- Prior art keywords
- inner tank
- tank
- circulation pump
- discharge pipe
- returning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Description
第１図は本考案の実施例１の斜視図、第２図は
本考案の実施例２の斜視図、第３図は循環槽を説
明する構成図、第４図は従来のエツチング槽の斜
視図である。
１……エツチング液、２……内槽、３……外槽
、４……循環ポンプ、５……入口、６……出口、
７，７ａ〜７ｄ……排出パイプ。
Fig. 1 is a perspective view of Embodiment 1 of the present invention, Fig. 2 is a perspective view of Embodiment 2 of the present invention, Fig. 3 is a configuration diagram explaining a circulation tank, and Fig. 4 is a perspective view of a conventional etching tank. It is a diagram. 1... Etching liquid, 2... Inner tank, 3... Outer tank, 4... Circulation pump, 5... Inlet, 6... Outlet,
7, 7a to 7d...Discharge pipe.
Claims (1)
ング装置において、内槽の外壁に、該内槽内の処
理液を循環ポンプ側に帰還させる排出パイプを設
けたことを特徴とするエツチング槽。 1. An etching device comprising a circulation pump, an inner tank, and an outer tank, characterized in that the outer wall of the inner tank is provided with a discharge pipe for returning the processing liquid in the inner tank to the circulation pump side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199188U JPH01154632U (en) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5199188U JPH01154632U (en) | 1988-04-18 | 1988-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01154632U true JPH01154632U (en) | 1989-10-24 |
Family
ID=31278004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5199188U Pending JPH01154632U (en) | 1988-04-18 | 1988-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01154632U (en) |
-
1988
- 1988-04-18 JP JP5199188U patent/JPH01154632U/ja active Pending