JPH01154442U - - Google Patents
Info
- Publication number
- JPH01154442U JPH01154442U JP5174888U JP5174888U JPH01154442U JP H01154442 U JPH01154442 U JP H01154442U JP 5174888 U JP5174888 U JP 5174888U JP 5174888 U JP5174888 U JP 5174888U JP H01154442 U JPH01154442 U JP H01154442U
- Authority
- JP
- Japan
- Prior art keywords
- silicon substrate
- card
- semiconductor
- pressure
- semiconductor gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 239000000919 ceramic Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5174888U JPH01154442U (ar) | 1988-04-18 | 1988-04-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5174888U JPH01154442U (ar) | 1988-04-18 | 1988-04-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01154442U true JPH01154442U (ar) | 1989-10-24 |
Family
ID=31277764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5174888U Pending JPH01154442U (ar) | 1988-04-18 | 1988-04-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01154442U (ar) |
-
1988
- 1988-04-18 JP JP5174888U patent/JPH01154442U/ja active Pending