JPH01153636U - - Google Patents
Info
- Publication number
- JPH01153636U JPH01153636U JP4519888U JP4519888U JPH01153636U JP H01153636 U JPH01153636 U JP H01153636U JP 4519888 U JP4519888 U JP 4519888U JP 4519888 U JP4519888 U JP 4519888U JP H01153636 U JPH01153636 U JP H01153636U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor manufacturing
- air cleaning
- attachment part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 claims 2
- 239000007791 liquid phase Substances 0.000 claims 1
- 238000009434 installation Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4519888U JPH01153636U (ko) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4519888U JPH01153636U (ko) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153636U true JPH01153636U (ko) | 1989-10-23 |
Family
ID=31271514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4519888U Pending JPH01153636U (ko) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153636U (ko) |
-
1988
- 1988-04-01 JP JP4519888U patent/JPH01153636U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH01153636U (ko) | ||
| JPS6237932U (ko) | ||
| JPH0465922U (en) | Antechamber structure of lean-burn gas engine | |
| JPS63188946U (ko) | ||
| JPS61146837U (ko) | ||
| JPS6270245U (ko) | ||
| JPS6313329U (ko) | ||
| JPS6291094U (ko) | ||
| JPH0477780U (ko) | ||
| JPH0297739U (ko) | ||
| JPH0377176U (ko) | ||
| JPS6225370U (ko) | ||
| JPS62112420U (ko) | ||
| JPH0248837U (ko) | ||
| JPS63185430U (ko) | ||
| JPS6418683U (ko) | ||
| JPS6155583U (ko) | ||
| JPH0335427U (ko) | ||
| JPS642063U (ko) | ||
| JPS6324453U (ko) | ||
| JPS6266108U (ko) | ||
| JPS62163321U (ko) | ||
| JPS62130298U (ko) | ||
| JPS6238424U (ko) | ||
| JPS61142961U (ko) |