JPH01153636U - - Google Patents
Info
- Publication number
- JPH01153636U JPH01153636U JP1988045198U JP4519888U JPH01153636U JP H01153636 U JPH01153636 U JP H01153636U JP 1988045198 U JP1988045198 U JP 1988045198U JP 4519888 U JP4519888 U JP 4519888U JP H01153636 U JPH01153636 U JP H01153636U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- semiconductor manufacturing
- air cleaning
- attachment part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988045198U JPH01153636U (enExample) | 1988-04-01 | 1988-04-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988045198U JPH01153636U (enExample) | 1988-04-01 | 1988-04-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153636U true JPH01153636U (enExample) | 1989-10-23 |
Family
ID=31271514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988045198U Pending JPH01153636U (enExample) | 1988-04-01 | 1988-04-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153636U (enExample) |
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1988
- 1988-04-01 JP JP1988045198U patent/JPH01153636U/ja active Pending