JPH01153368U - - Google Patents
Info
- Publication number
- JPH01153368U JPH01153368U JP4869988U JP4869988U JPH01153368U JP H01153368 U JPH01153368 U JP H01153368U JP 4869988 U JP4869988 U JP 4869988U JP 4869988 U JP4869988 U JP 4869988U JP H01153368 U JPH01153368 U JP H01153368U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- epitaxial
- growth apparatus
- heat exchanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001947 vapour-phase growth Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4869988U JPH01153368U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4869988U JPH01153368U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01153368U true JPH01153368U (enrdf_load_stackoverflow) | 1989-10-23 |
Family
ID=31274835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4869988U Pending JPH01153368U (enrdf_load_stackoverflow) | 1988-04-11 | 1988-04-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01153368U (enrdf_load_stackoverflow) |
-
1988
- 1988-04-11 JP JP4869988U patent/JPH01153368U/ja active Pending
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