JPH01153359U - - Google Patents

Info

Publication number
JPH01153359U
JPH01153359U JP5120588U JP5120588U JPH01153359U JP H01153359 U JPH01153359 U JP H01153359U JP 5120588 U JP5120588 U JP 5120588U JP 5120588 U JP5120588 U JP 5120588U JP H01153359 U JPH01153359 U JP H01153359U
Authority
JP
Japan
Prior art keywords
stopper
command
pass
block
beam stopper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5120588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5120588U priority Critical patent/JPH01153359U/ja
Publication of JPH01153359U publication Critical patent/JPH01153359U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP5120588U 1988-04-15 1988-04-15 Pending JPH01153359U (US07923587-20110412-C00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5120588U JPH01153359U (US07923587-20110412-C00022.png) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5120588U JPH01153359U (US07923587-20110412-C00022.png) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01153359U true JPH01153359U (US07923587-20110412-C00022.png) 1989-10-23

Family

ID=31277236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5120588U Pending JPH01153359U (US07923587-20110412-C00022.png) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01153359U (US07923587-20110412-C00022.png)

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