JPH01152767U - - Google Patents
Info
- Publication number
- JPH01152767U JPH01152767U JP4697888U JP4697888U JPH01152767U JP H01152767 U JPH01152767 U JP H01152767U JP 4697888 U JP4697888 U JP 4697888U JP 4697888 U JP4697888 U JP 4697888U JP H01152767 U JPH01152767 U JP H01152767U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- coated
- edge
- rotates
- rotary coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 230000001154 acute effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000004804 winding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4697888U JPH01152767U (enExample) | 1988-04-07 | 1988-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4697888U JPH01152767U (enExample) | 1988-04-07 | 1988-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01152767U true JPH01152767U (enExample) | 1989-10-20 |
Family
ID=31273213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4697888U Pending JPH01152767U (enExample) | 1988-04-07 | 1988-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01152767U (enExample) |
-
1988
- 1988-04-07 JP JP4697888U patent/JPH01152767U/ja active Pending