JPH01152767U - - Google Patents

Info

Publication number
JPH01152767U
JPH01152767U JP4697888U JP4697888U JPH01152767U JP H01152767 U JPH01152767 U JP H01152767U JP 4697888 U JP4697888 U JP 4697888U JP 4697888 U JP4697888 U JP 4697888U JP H01152767 U JPH01152767 U JP H01152767U
Authority
JP
Japan
Prior art keywords
substrate holder
coated
edge
rotates
rotary coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4697888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4697888U priority Critical patent/JPH01152767U/ja
Publication of JPH01152767U publication Critical patent/JPH01152767U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4697888U 1988-04-07 1988-04-07 Pending JPH01152767U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4697888U JPH01152767U (enrdf_load_stackoverflow) 1988-04-07 1988-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4697888U JPH01152767U (enrdf_load_stackoverflow) 1988-04-07 1988-04-07

Publications (1)

Publication Number Publication Date
JPH01152767U true JPH01152767U (enrdf_load_stackoverflow) 1989-10-20

Family

ID=31273213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4697888U Pending JPH01152767U (enrdf_load_stackoverflow) 1988-04-07 1988-04-07

Country Status (1)

Country Link
JP (1) JPH01152767U (enrdf_load_stackoverflow)

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