JPH01152231U - - Google Patents
Info
- Publication number
- JPH01152231U JPH01152231U JP4962488U JP4962488U JPH01152231U JP H01152231 U JPH01152231 U JP H01152231U JP 4962488 U JP4962488 U JP 4962488U JP 4962488 U JP4962488 U JP 4962488U JP H01152231 U JPH01152231 U JP H01152231U
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- diaphragm
- silicon
- recess
- vibrating beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 claims 8
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4962488U JPH01152231U (es) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4962488U JPH01152231U (es) | 1988-04-13 | 1988-04-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01152231U true JPH01152231U (es) | 1989-10-20 |
Family
ID=31275712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4962488U Pending JPH01152231U (es) | 1988-04-13 | 1988-04-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01152231U (es) |
-
1988
- 1988-04-13 JP JP4962488U patent/JPH01152231U/ja active Pending