JPH01151231U - - Google Patents

Info

Publication number
JPH01151231U
JPH01151231U JP4715888U JP4715888U JPH01151231U JP H01151231 U JPH01151231 U JP H01151231U JP 4715888 U JP4715888 U JP 4715888U JP 4715888 U JP4715888 U JP 4715888U JP H01151231 U JPH01151231 U JP H01151231U
Authority
JP
Japan
Prior art keywords
valve
flow path
exhaust flow
specimen
test device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4715888U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4715888U priority Critical patent/JPH01151231U/ja
Publication of JPH01151231U publication Critical patent/JPH01151231U/ja
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係るリークテスト装置の一例
を示す構成図である。第2図は従来のリークテス
ト装置を示す構成図である。 1……密封容器、8……排気流路、9……開閉
弁、10……質量流量計、13……バイパス開閉
弁、W……供試体。
FIG. 1 is a configuration diagram showing an example of a leak test device according to the present invention. FIG. 2 is a configuration diagram showing a conventional leak test device. DESCRIPTION OF SYMBOLS 1... Sealed container, 8... Exhaust flow path, 9... On-off valve, 10... Mass flowmeter, 13... Bypass on-off valve, W... Specimen.

Claims (1)

【実用新案登録請求の範囲】 (1) 開閉自在な密封容器内に供試体を収容して
この供試体に試験用気体を充填するように構成す
ると共に、前記密封容器に排気流路を接続し、こ
の排気流路に質量流量計を設けたことを特徴とす
るリークテスト装置。 (2) 排気流路の質量流量計よりも上流側に開閉
弁を設けると共に、この開閉弁に対して並列にバ
イパス開閉弁を設けたことを特徴とする請求項第
(1)項に記載のリークテスト装置。
[Claims for Utility Model Registration] (1) A specimen is housed in a sealed container that can be opened and closed, and the specimen is filled with a test gas, and an exhaust flow path is connected to the sealed container. A leak test device characterized in that a mass flow meter is provided in the exhaust flow path. (2) Claim No. 1, characterized in that an on-off valve is provided upstream of the mass flow meter in the exhaust flow path, and a bypass on-off valve is provided in parallel to this on-off valve.
Leak test device described in paragraph (1).
JP4715888U 1988-04-06 1988-04-06 Pending JPH01151231U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4715888U JPH01151231U (en) 1988-04-06 1988-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4715888U JPH01151231U (en) 1988-04-06 1988-04-06

Publications (1)

Publication Number Publication Date
JPH01151231U true JPH01151231U (en) 1989-10-19

Family

ID=31273384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4715888U Pending JPH01151231U (en) 1988-04-06 1988-04-06

Country Status (1)

Country Link
JP (1) JPH01151231U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013242275A (en) * 2012-05-22 2013-12-05 Horiba Ltd Exhaust gas analysis system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013242275A (en) * 2012-05-22 2013-12-05 Horiba Ltd Exhaust gas analysis system
US9964512B2 (en) 2012-05-22 2018-05-08 Horiba, Ltd. Exhaust gas analyzing system

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