JPH01151148U - - Google Patents

Info

Publication number
JPH01151148U
JPH01151148U JP4780188U JP4780188U JPH01151148U JP H01151148 U JPH01151148 U JP H01151148U JP 4780188 U JP4780188 U JP 4780188U JP 4780188 U JP4780188 U JP 4780188U JP H01151148 U JPH01151148 U JP H01151148U
Authority
JP
Japan
Prior art keywords
grating
outlet
mesh
suction port
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4780188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4780188U priority Critical patent/JPH01151148U/ja
Publication of JPH01151148U publication Critical patent/JPH01151148U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP4780188U 1988-04-11 1988-04-11 Pending JPH01151148U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4780188U JPH01151148U (US06815460-20041109-C00097.png) 1988-04-11 1988-04-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4780188U JPH01151148U (US06815460-20041109-C00097.png) 1988-04-11 1988-04-11

Publications (1)

Publication Number Publication Date
JPH01151148U true JPH01151148U (US06815460-20041109-C00097.png) 1989-10-18

Family

ID=31273986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4780188U Pending JPH01151148U (US06815460-20041109-C00097.png) 1988-04-11 1988-04-11

Country Status (1)

Country Link
JP (1) JPH01151148U (US06815460-20041109-C00097.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6191433A (ja) * 1984-10-11 1986-05-09 Hitachi Ltd クリ−ンル−ム
JPS61202028A (ja) * 1985-03-06 1986-09-06 Kiyohiro Eng:Kk 除塵装置内蔵の壁部材

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6191433A (ja) * 1984-10-11 1986-05-09 Hitachi Ltd クリ−ンル−ム
JPS61202028A (ja) * 1985-03-06 1986-09-06 Kiyohiro Eng:Kk 除塵装置内蔵の壁部材

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