JPH01150956U - - Google Patents

Info

Publication number
JPH01150956U
JPH01150956U JP4663988U JP4663988U JPH01150956U JP H01150956 U JPH01150956 U JP H01150956U JP 4663988 U JP4663988 U JP 4663988U JP 4663988 U JP4663988 U JP 4663988U JP H01150956 U JPH01150956 U JP H01150956U
Authority
JP
Japan
Prior art keywords
vaporizer
flow rate
oxygen gas
inlet
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4663988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4663988U priority Critical patent/JPH01150956U/ja
Publication of JPH01150956U publication Critical patent/JPH01150956U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Pipeline Systems (AREA)
  • Flow Control (AREA)
JP4663988U 1988-04-06 1988-04-06 Pending JPH01150956U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4663988U JPH01150956U (de) 1988-04-06 1988-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4663988U JPH01150956U (de) 1988-04-06 1988-04-06

Publications (1)

Publication Number Publication Date
JPH01150956U true JPH01150956U (de) 1989-10-18

Family

ID=31272905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4663988U Pending JPH01150956U (de) 1988-04-06 1988-04-06

Country Status (1)

Country Link
JP (1) JPH01150956U (de)

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