JPH01149461U - - Google Patents

Info

Publication number
JPH01149461U
JPH01149461U JP4453188U JP4453188U JPH01149461U JP H01149461 U JPH01149461 U JP H01149461U JP 4453188 U JP4453188 U JP 4453188U JP 4453188 U JP4453188 U JP 4453188U JP H01149461 U JPH01149461 U JP H01149461U
Authority
JP
Japan
Prior art keywords
vacuum
outer cylinder
welding
flange
disposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4453188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4453188U priority Critical patent/JPH01149461U/ja
Publication of JPH01149461U publication Critical patent/JPH01149461U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4453188U 1988-03-31 1988-03-31 Pending JPH01149461U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4453188U JPH01149461U (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4453188U JPH01149461U (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Publications (1)

Publication Number Publication Date
JPH01149461U true JPH01149461U (enrdf_load_stackoverflow) 1989-10-17

Family

ID=31270883

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4453188U Pending JPH01149461U (enrdf_load_stackoverflow) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH01149461U (enrdf_load_stackoverflow)

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