JPH01149340A - Image pickup tube - Google Patents
Image pickup tubeInfo
- Publication number
- JPH01149340A JPH01149340A JP30564587A JP30564587A JPH01149340A JP H01149340 A JPH01149340 A JP H01149340A JP 30564587 A JP30564587 A JP 30564587A JP 30564587 A JP30564587 A JP 30564587A JP H01149340 A JPH01149340 A JP H01149340A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- photo
- image
- image pickup
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 14
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 15
- 239000010408 film Substances 0.000 claims description 8
- 238000003384 imaging method Methods 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 11
- 239000000126 substance Substances 0.000 abstract 3
- 230000001771 impaired effect Effects 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Transforming Light Signals Into Electric Signals (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はX線像を直接撮像するX線用撮像管に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an X-ray imaging tube that directly captures an X-ray image.
本発明はXfi1波長の広い範囲にわたり撮像可能な、
また解像度が劣っても感度が必要な撮像及び感度より解
像度が必要な撮像等幅広い利用が可能な撮像管を供給す
ることを目的とし9面板構造に蛍光体を加えたことを特
徴とするものである。The present invention is capable of imaging over a wide range of Xfi1 wavelengths.
It is also characterized by the addition of phosphor to the nine-sided plate structure, with the aim of providing an image pickup tube that can be used in a wide range of applications, such as imaging that requires sensitivity even if the resolution is poor, and imaging that requires resolution rather than sensitivity. be.
従来直接X線像を撮像する撮像管にはX線に感度のある
光導電面&’lbO,又はS e −A sを使用した
ものがある。第2図は従来の撮像管の面板構造の一例で
ある。1はX!透過と真空気密を保つための金属Be板
であり、2は光導電面加工上きず発生防止を考慮したガ
ラスの薄膜である。3はXIJに感度のあるS e −
A s光導電膜である。S e −A s光導電膜は解
像度では問題ないが、感度7嘴)b、oに比較し劣る。Conventional image pickup tubes for directly taking X-ray images include those using a photoconductive surface &'lbO or S e -A s sensitive to X-rays. FIG. 2 shows an example of the face plate structure of a conventional image pickup tube. 1 is X! A metal Be plate is used to maintain transmission and vacuum tightness, and 2 is a glass thin film designed to prevent scratches during processing of the photoconductive surface. 3 is S e - sensitive to XIJ
A s photoconductive film. Although the S e -A s photoconductive film has no problem in resolution, it is inferior to the sensitivity 7)b and o.
このため解像度を主に目的とし、5e−A s感度内の
X線の測定には使用できるが、解像度外の測定には使用
範囲が制限される。For this reason, resolution is the main objective, and although it can be used for measuring X-rays within the 5e-As sensitivity, the range of use is limited for measurements outside the resolution.
この分野の撮像管に要求される特注としては。 This is a custom order required for image pickup tubes in this field.
感度、解像度それにX?fM波長範囲の広いことがある
。これに対しB6IO,5e−As光導電面使用の撮像
管は、前者が解像度に後者が感度に難がある。Sensitivity, resolution and X? The fM wavelength range may be wide. On the other hand, an image pickup tube using a B6IO, 5e-As photoconductive surface has a problem in resolution in the former case and in sensitivity in the latter case.
また両者とも光導電面の゛特性から波長範囲が決まる。In both cases, the wavelength range is determined by the characteristics of the photoconductive surface.
以上から従来の撮像管では使用分野が制限される欠点が
ある。From the above, conventional image pickup tubes have the drawback of being limited in the field of use.
本発明は上記の問題点を解決するため、X線に感度のあ
る光導電面を使用した撮像管に使用する面板構造におい
て、Be板と薄膜ガラス板の間に蛍光体を入れたもので
ある。In order to solve the above problems, the present invention includes a face plate structure used in an image pickup tube using a photoconductive surface sensitive to X-rays, in which a phosphor is inserted between the Be plate and the thin glass plate.
その結果Be板からX線が入射されると蛍光体層が発光
する。この発光した像は光導電膜で光電変換される。す
なわち、X線が入射した場合蛍光体で可視光に変換後光
導電面で光電変換されるものと直接光導電面で変換され
るものとの2重に変換される。As a result, when X-rays are incident from the Be plate, the phosphor layer emits light. This emitted image is photoelectrically converted by a photoconductive film. That is, when X-rays are incident, they are converted into visible light by the phosphor and then photoelectrically converted by the photoconductive surface, and converted directly by the photoconductive surface.
第1図の面版が本発明の面板構造である。1はBe板で
2はガラス板、3は光導電面である。4はBe板とガラ
ス板の間に使用する蛍光体層である。この撮1象管の動
作としてはBe板からX線が入射されると蛍光体層4で
発光する。この発光した像は2の光導電膜で光電変換さ
れテレビ画像として取り出すことができる。また一方X
線が光導電膜2に入射することによりこのX線像が直接
テレビ画像として取り出されることにもなる。要するに
X#i!が入射した場合蛍光体で可視光に変換し光導電
面で光電変換されるものと直接光導電面で変換される2
重の変換を考えた構造である。The face plate shown in FIG. 1 is the face plate structure of the present invention. 1 is a Be plate, 2 is a glass plate, and 3 is a photoconductive surface. 4 is a phosphor layer used between the Be plate and the glass plate. As for the operation of this imaging tube, when X-rays are incident from the Be plate, the phosphor layer 4 emits light. This emitted image is photoelectrically converted by the photoconductive film 2 and can be taken out as a television image. On the other hand, X
When the rays are incident on the photoconductive film 2, this X-ray image can also be taken out directly as a television image. In short, X#i! When incident, it is converted into visible light by the phosphor and photoelectrically converted by the photoconductive surface, and 2 is directly converted by the photoconductive surface.
It is a structure that takes into consideration the conversion of weight.
次に本発明の面板の加工方法について述べる。Next, a method for processing a face plate according to the present invention will be described.
Be板10表面に目的に合った蛍光体を真空蒸着法、電
着法又は沈降法で塗布する。蛍光体は粒度。A phosphor suitable for the purpose is applied to the surface of the Be plate 10 by vacuum evaporation, electrodeposition, or precipitation. The phosphor is granular.
感度等を考慮して選択する。Select by considering sensitivity etc.
次にこの蛍光体の上に薄(研磨した。薄膜ガラスを付け
る。ガラス板はエポキシ樹脂等の接着剤で接着する。こ
のガラス板2の上に光導電膜3を真空蒸着する。ここで
蛍光体層は直接Be板上に塗布する以外に蛍光板等X線
に発光する板を貼り合わせても可能である。Next, a thin (polished) thin film glass is attached on top of this phosphor. The glass plate is adhered with an adhesive such as epoxy resin. A photoconductive film 3 is vacuum-deposited on this glass plate 2. The body layer can be formed not only by directly coating the Be plate but also by bonding a plate that emits X-rays such as a fluorescent plate.
また本実施例はBe板で述べたが、蛍光体にCs Iを
使用する時はAI板を使用することも可能である。Although this embodiment has been described using a Be plate, it is also possible to use an AI plate when CsI is used as the phosphor.
以上述べたように3本発明による本撮像管を使用すれば
、X線波長の広い範囲にわたり撮像可能な、また解像度
が劣っても感度が必要な撮像及び感度より解像度が必要
な撮像等幅広い観測が可能なテレビカメラを供給するこ
とができる。As described above, by using the image pickup tube according to the present invention, it is possible to capture images over a wide range of X-ray wavelengths, and also for a wide range of observations such as imaging that requires sensitivity even if the resolution is poor, and imaging that requires resolution rather than sensitivity. We can supply television cameras that are capable of
第1図は本発明の実施例を示す面板構造図である。第2
図は従来の面板構造図である。
1:金属Be板、2:薄膜ガラス板、3:光導電膜、4
:蛍光体層
代理人 弁理士 小川J愕男、〒
□ 、、′−
\\−−−。FIG. 1 is a structural diagram of a face plate showing an embodiment of the present invention. Second
The figure is a structural diagram of a conventional face plate. 1: Metal Be plate, 2: Thin glass plate, 3: Photoconductive film, 4
: Phosphor layer agent Patent attorney J. Ogawa, 〒 □ ,,′− \\−−−.
Claims (1)
する面板構造において、Be板と薄膜ガラス板の間に蛍
光体を設けたことを特徴としたX線用撮像管。 2、Be板の表面に蛍光体を設けこの蛍光体の上に薄く
研磨した薄膜ガラスを付け、このガラス板の上に光導電
膜を真空蒸着して成る撮像管。[Claims] 1. An X-ray imaging device characterized in that a phosphor is provided between a Be plate and a thin glass plate in a face plate structure used in an image pickup tube using a photoconductive surface sensitive to X-rays. tube. 2. An image pickup tube made by providing a phosphor on the surface of a Be plate, attaching a thin, polished thin film of glass on top of the phosphor, and vacuum-depositing a photoconductive film on the glass plate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30564587A JPH01149340A (en) | 1987-12-04 | 1987-12-04 | Image pickup tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30564587A JPH01149340A (en) | 1987-12-04 | 1987-12-04 | Image pickup tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01149340A true JPH01149340A (en) | 1989-06-12 |
Family
ID=17947625
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30564587A Pending JPH01149340A (en) | 1987-12-04 | 1987-12-04 | Image pickup tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01149340A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002330905A (en) * | 2001-05-08 | 2002-11-19 | Kowa Co Ltd | Rotating rotor for floor nozzle for vacuum cleaner |
CN111940176A (en) * | 2020-08-15 | 2020-11-17 | 林高兴 | Automatic unloader of unpowered foundry goods |
-
1987
- 1987-12-04 JP JP30564587A patent/JPH01149340A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002330905A (en) * | 2001-05-08 | 2002-11-19 | Kowa Co Ltd | Rotating rotor for floor nozzle for vacuum cleaner |
CN111940176A (en) * | 2020-08-15 | 2020-11-17 | 林高兴 | Automatic unloader of unpowered foundry goods |
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