JPH01149267U - - Google Patents
Info
- Publication number
- JPH01149267U JPH01149267U JP4580388U JP4580388U JPH01149267U JP H01149267 U JPH01149267 U JP H01149267U JP 4580388 U JP4580388 U JP 4580388U JP 4580388 U JP4580388 U JP 4580388U JP H01149267 U JPH01149267 U JP H01149267U
- Authority
- JP
- Japan
- Prior art keywords
- handles
- wafer
- suction cup
- tweezers
- grasping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Description
第１図は本考案の一実施例の側面図、第２図は
該実施例のピンセツトを閉じた際の側面図、第３
図は第１図の正面図、第４図は第１図の背面図、
第５図は本考案の他の実施例の側面図である。
１……吸盤、２……チユーブ、３……空気孔開
閉用突起、４……ウエハー、５……空気孔、６…
…吸盤離脱用突起。
Fig. 1 is a side view of one embodiment of the present invention, Fig. 2 is a side view of the tweezers of the embodiment when it is closed, and Fig. 3 is a side view of an embodiment of the present invention.
The figure is a front view of figure 1, figure 4 is a back view of figure 1,
FIG. 5 is a side view of another embodiment of the present invention. 1... Suction cup, 2... Tube, 3... Air hole opening/closing protrusion, 4... Wafer, 5... Air hole, 6...
...Suction cup release protrusion.
Claims (1)
ハーの両面をつかむピンセツトにおいて、前記柄
の他端に平面上にのつたウエハーを持ち上げられ
る吸盤を有することを特徴とするピンセツト。 A tweezers for grasping both sides of a wafer between the ends of two handles that open and close with elasticity, characterized in that the other end of the handles has a suction cup capable of lifting a wafer placed on a flat surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4580388U JPH01149267U (en) | 1988-04-04 | 1988-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4580388U JPH01149267U (en) | 1988-04-04 | 1988-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149267U true JPH01149267U (en) | 1989-10-16 |
Family
ID=31272100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4580388U Pending JPH01149267U (en) | 1988-04-04 | 1988-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149267U (en) |
-
1988
- 1988-04-04 JP JP4580388U patent/JPH01149267U/ja active Pending