JPH01148847U - - Google Patents
Info
- Publication number
- JPH01148847U JPH01148847U JP4646288U JP4646288U JPH01148847U JP H01148847 U JPH01148847 U JP H01148847U JP 4646288 U JP4646288 U JP 4646288U JP 4646288 U JP4646288 U JP 4646288U JP H01148847 U JPH01148847 U JP H01148847U
- Authority
- JP
- Japan
- Prior art keywords
- counter
- foreign matter
- optical system
- sampling
- matter removal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4646288U JPH01148847U (en:Method) | 1988-04-05 | 1988-04-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4646288U JPH01148847U (en:Method) | 1988-04-05 | 1988-04-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148847U true JPH01148847U (en:Method) | 1989-10-16 |
Family
ID=31272730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4646288U Pending JPH01148847U (en:Method) | 1988-04-05 | 1988-04-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148847U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430462U (en:Method) * | 1990-07-05 | 1992-03-11 |
-
1988
- 1988-04-05 JP JP4646288U patent/JPH01148847U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430462U (en:Method) * | 1990-07-05 | 1992-03-11 |