JPH01148098U - - Google Patents
Info
- Publication number
- JPH01148098U JPH01148098U JP4442688U JP4442688U JPH01148098U JP H01148098 U JPH01148098 U JP H01148098U JP 4442688 U JP4442688 U JP 4442688U JP 4442688 U JP4442688 U JP 4442688U JP H01148098 U JPH01148098 U JP H01148098U
- Authority
- JP
- Japan
- Prior art keywords
- oil
- temperature sensor
- turbo
- molecular pump
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4442688U JPH01148098U (enExample) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4442688U JPH01148098U (enExample) | 1988-03-31 | 1988-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01148098U true JPH01148098U (enExample) | 1989-10-13 |
Family
ID=31270784
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4442688U Pending JPH01148098U (enExample) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01148098U (enExample) |
-
1988
- 1988-03-31 JP JP4442688U patent/JPH01148098U/ja active Pending