JPH01148098U - - Google Patents

Info

Publication number
JPH01148098U
JPH01148098U JP4442688U JP4442688U JPH01148098U JP H01148098 U JPH01148098 U JP H01148098U JP 4442688 U JP4442688 U JP 4442688U JP 4442688 U JP4442688 U JP 4442688U JP H01148098 U JPH01148098 U JP H01148098U
Authority
JP
Japan
Prior art keywords
oil
temperature sensor
turbo
molecular pump
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4442688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4442688U priority Critical patent/JPH01148098U/ja
Publication of JPH01148098U publication Critical patent/JPH01148098U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP4442688U 1988-03-31 1988-03-31 Pending JPH01148098U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4442688U JPH01148098U (enrdf_load_html_response) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4442688U JPH01148098U (enrdf_load_html_response) 1988-03-31 1988-03-31

Publications (1)

Publication Number Publication Date
JPH01148098U true JPH01148098U (enrdf_load_html_response) 1989-10-13

Family

ID=31270784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4442688U Pending JPH01148098U (enrdf_load_html_response) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH01148098U (enrdf_load_html_response)

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